Wireless MEMS Temperature Sensor for Rotating Machinery
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Solution Overview
Problem
Existing temperature sensors are unsuitable for high-temperature, rotating machinery environments due to limitations in durability, reliability, and the need for line-of-sight communication, with existing solutions like wired sensors, infrared sensors, and active silicon circuits failing to provide effective temperature monitoring in harsh conditions.
Innovation Solution
A micro-electromechanical system (MEMS) sensor arrangement that includes a multimorph sensor, a sensor coil, and a readout coil for wireless temperature measurement, utilizing magnetic coupling for energization and readout, and an energizing circuit to measure the natural frequency of the multimorph sensor, allowing for reliable operation in high-temperature environments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If wired sensors (thermocouples, fiber optic sensors) are used for temperature monitoring, then temperature measurement capability is provided, but they are unsuitable for rotating machinery due to continuous rotation around a shaft
Solution Approach 1:
The patent replaces wired mechanical connections with a wireless magnetic coupling system. The sensor coil and readout coil enable inductive coupling through the rotating component without physical wire connections, eliminating the mechanical constraint that prevented sensor use in rotating machinery.
2Reliability
If infrared sensors are used for wireless temperature measurement, then wireless capability is provided, but they require line-of-sight which is often not possible within bearing housing
Solution Approach 1:
The patent introduces magnetic fields as an intermediary for energy and data transmission between the sensor coil and readout coil. This magnetic coupling intermediary enables wireless communication through opaque, enclosed spaces like bearing housings without requiring optical line-of-sight.
3Measurement precision
If active silicon circuits are used for temperature sensing, then measurement functionality is provided, but they become ineffective at temperatures approaching 300°C due to low bandgap of silicon
Solution Approach 1:
The patent extracts the active electronic circuitry from the high-temperature environment. The sensor coil and multimorph sensor can operate at high temperatures without active silicon circuits, while the readout circuitry operates at lower temperatures where silicon circuits remain effective, thus extending the maximum operating temperature capability.
4Temperature
If high-bandgap materials (silicon carbide, gallium nitride) are used for high-temperature operation, then temperature resistance is improved, but they suffer from high cost as well as reliability and repeatability challenges
Solution Approach 1:
The patent uses a passive multimorph sensor that copies or mimics the high-temperature capability through its material composition and structural design, rather than relying on expensive high-bandgap semiconductor materials. The sensor responds to temperature changes through physical deformation that can be detected by the coil system, achieving high-temperature operation with standard materials.
5Measurement precision
If active circuits with power sources are used for sensing, then measurement functionality is provided, but batteries are detrimental at elevated temperatures requiring impracticable energy harvesting or wireless powering schemes
Solution Approach 1:
The passive sensor design allows the sensor structure itself to serve as the sensing element without requiring external power sources. The multimorph sensor naturally responds to temperature changes through physical deformation, and the magnetic coupling system passively transfers energy and information without batteries or active power management circuits in the high-temperature environment.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The MEMS sensor arrangement provides reliable, wireless temperature measurement in high-temperature, rotating machinery environments with improved durability and reliability, capable of withstanding temperatures up to 300°C and offering enhanced accuracy and sensitivity compared to prior art.
Implementation Method 1
a readout coil configured to be magnetically coupled to the sensor coil to i) energize the sensor coil, and ii) provide a readout of the natural frequency of the mulimorph sensor, the sensor coil and the readout coil
Implementation Method 2
The MEMS sensor arrangement includes a multimorph sensor, a sensor coil coupled to the multimorph sensor... provide a readout of the natural frequency of the mulimorph sensor
Data Source
AI summary
A sensor arrangement for wirelessly measuring temperature and vibration is disclosed. The sensor arrangement includes a sensor element and a sensor coil affixed on the device. A readout coil is configured to be magnetically coupled to the sensor coil configured to energize the sensor coil with an energizing signal, configured to provide the natural frequency of the sensor element, the sensor coil, and the readout coil, and configured to provide amplitude modulations of the energizing signal, the amplitude modulations being induced by changes in the coupling factor of the readout coil and the sensor coil. An energizing circuit is configured to energize the readout coil with the energizing signal. A readout circuit is configured to store or display information regarding the natural frequency and the amplitude modulations.