Wireless In-Situ Plasma Diagnostics for Precise Chamber Measurement
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Solution Overview
Problem
Existing plasma diagnostic methods require regular preventive maintenance, are cumbersome to implement, and often yield discrepancies between viewport measurements and wafer surface results, necessitating a more efficient, in-situ diagnostic solution.
Innovation Solution
A wireless, in-situ plasma diagnostic apparatus utilizing coherent sampling and window functions, integrated with a thin battery and low-power ICs, enabling auto-loading through a FOUP and reducing power consumption while enhancing sensitivity and reducing computational burden.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a wireless in-situ plasma diagnostic apparatus is implemented, then measurement precision and ease of operation are improved, but device complexity increases due to integration of multiple circuits and battery on substrate
Solution Approach 1:
The patent combines the plasma diagnostic circuit, wireless communication circuit, and battery onto a single substrate, creating an integrated in-situ diagnostic apparatus. This merging approach enables precise plasma measurements while maintaining operational simplicity through unified design, resolving the contradiction between measurement precision and device complexity.
Solution Approach 2:
The substrate-based integration allows the apparatus to perform multiple functions (plasma diagnosis, wireless communication, power supply) within a single compact unit. This multi-functionality improves measurement precision through stable in-situ operation while managing complexity through standardized universal platform design.
2Measurement precision
If coherent sampling and window functions are used in plasma diagnostic circuit, then measurement precision is improved, but use of energy increases due to computational processing
Solution Approach 1:
The patent applies coherent sampling and window functions selectively to enhance plasma signal analysis precision only when needed, rather than continuously processing all signals. This partial application of advanced computational methods improves measurement precision while controlling energy consumption by avoiding unnecessary complex processing.
3Device complexity
If a thin battery is used to reduce device size, then device complexity is reduced, but duration of action decreases due to limited power capacity
Solution Approach 1:
The patent optimizes battery parameters (capacity, thickness, power density) to achieve the right balance between compact size and sufficient operational duration. By carefully selecting and adjusting battery parameters, the apparatus maintains thin profile for easy integration while ensuring adequate power supply for the intended operational lifetime.
4Use of energy by moving object
If low-power ICs are used to reduce energy consumption, then use of energy is reduced, but manufacturing precision requirements increase
Solution Approach 1:
The patent employs standard low-power IC designs that balance power consumption with manufacturing feasibility. Rather than using cutting-edge ultra-low-power components with stringent precision requirements, the solution uses commercially available low-power ICs that offer adequate power savings with relaxed manufacturing tolerances, simplifying production.
Data Source
AI summary
A plasma diagnostic apparatus includes a substrate having at least one probe, a plasma diagnostic circuit mounted on the substrate, configured to diagnose plasma in a chamber with the at least one probe, and to store diagnosis result information, a wireless communication circuit mounted on the substrate and configured to wirelessly transmit the diagnosis result information to an external device, and a battery mounted on the substrate and configured to supply power to the plasma diagnostic circuit and to the wireless communication circuit.