Wireless Sensor Substrate Transfer Container for Semiconductor Wafer Monitoring

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Solution Overview

Problem

Semiconductor wafers are prone to contamination and physical damage during storage and transfer, requiring precise handling to prevent exposure to dust, moisture, and other impurities, and there is a need to monitor the environment within substrate transfer containers to ensure cleanliness and proper gas purge operations in semiconductor manufacturing.

Innovation Solution

The implementation of substrate transfer containers equipped with detection units and signal transmission modules that monitor environmental properties, such as airborne molecular contaminants, humidity, and pressure, and gas purge monitoring tools that verify the operation of purge units, using wireless transmission to ensure remote monitoring and control.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If substrate transfer containers are used to protect wafers from contamination and damage, then wafer safety is improved, but monitoring of environmental conditions inside the container becomes difficult

Engineering Contradiction:

Improvewafer protectionVSAvoidenvironmental monitoring

Core Design Contradiction:

ReliabilityVSDifficulty of detecting and measuring

Solution Approach 1:

The patent introduces detection units as intermediary devices that measure environmental conditions (temperature, humidity, contamination) inside the sealed container and transmit data externally. This allows monitoring without compromising the seal or direct protection function of the container.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent replaces physical intervention methods with wireless sensing and communication technology. Detection units use electronic sensors and wireless transmitters to monitor conditions without mechanical access to the container interior, maintaining the seal while enabling remote environmental monitoring.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Object-affected harmful factors

If purge units are used to supply purge gas into substrate transfer containers, then contamination is reduced, but verification of purge unit operation becomes difficult

Engineering Contradiction:

Improvecontamination reductionVSAvoidpurge operation verification

Core Design Contradiction:

Object-affected harmful factorsVSDifficulty of detecting and measuring

Solution Approach 1:

The patent implements feedback mechanisms where detection units continuously monitor environmental conditions and transmit data to verify whether purge units are operating correctly. This closed-loop system provides real-time confirmation that purge operations are achieving the desired contamination reduction.

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The detection units are integrated into the container system to automatically monitor and report on their own environmental conditions and the effectiveness of purge operations, eliminating the need for external verification systems.

Inventive Principle:

Principle #25Self-service

3Measurement precision

If detection units and signal transmission modules are added to substrate transfer containers, then environmental monitoring is enabled, but device complexity increases

Engineering Contradiction:

Improveenvironmental property detectionVSAvoidcontainer structure

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The detection units are designed to monitor multiple environmental parameters (temperature, humidity, contamination levels) simultaneously using integrated sensor arrays, reducing the need for separate monitoring devices and minimizing overall system complexity.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent uses wireless transmission modules as intermediaries to communicate data from the container interior to external monitoring systems, eliminating the need for complex wired connections or physical access points while maintaining measurement precision.

Inventive Principle:

Principle #24Intermediary (Mediator)

4Ease of operation

If wireless transmission is used to transmit detection signals from containers, then remote monitoring is enabled, but power supply requirements increase

Engineering Contradiction:

Improveremote monitoring capabilityVSAvoidpower consumption

Core Design Contradiction:

Ease of operationVSUse of energy by moving object

Solution Approach 1:

The wireless transmission modules operate in periodic intervals rather than continuously, transmitting detection data at scheduled times or when threshold changes are detected. This reduces overall power consumption while maintaining effective remote monitoring capability.

Inventive Principle:

Principle #19Periodic action

Data Source

PatentUS8591809B2Substrate transfer container, gas purge monitoring tool, and semiconductor manufacturing equipment with the same

Publication Date: 2013.11.26 SAMSUNG ELECTRONICS CO LTD

AI summary

A substrate transfer container comprises a housing including a plurality of substrate slots positioned within a gas chamber having an interior environment. Each substrate slot accommodates a substrate undergoing a substrate manufacturing process, the interior environment of the gas chamber being selectively sealed from an exterior environment. A detection unit at the housing is constructed and arranged to detect an environmental property of the interior environment of the gas chamber, and to generate a detection signal in response. A signal transmission module at the housing is configured to wirelessly transmit a detection signal received from the detection unit.