Wireless Substrate Temperature Sensing During Retainer Rotation

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Solution Overview

Problem

The disconnection of cables used for temperature measurement due to rotation of the substrate boat poses a challenge, preventing the rotation of the boat and substrate during temperature measurement.

Innovation Solution

A substrate temperature sensor is integrated into a protective pipe within a substrate retainer, allowing for wireless transmission of temperature data, eliminating the need for physical cables that could be disconnected during rotation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a cable is used to transmit temperature data from the substrate, then temperature measurement is enabled, but the cable may be disconnected when the substrate boat is rotated

Engineering Contradiction:

Improvetemperature measurementVSAvoidcable connection reliability

Core Design Contradiction:

Measurement precisionVSReliability

Solution Approach 1:

The patent replaces the mechanical cable connection system with a wireless communication system. The temperature sensor transmits data wirelessly to the external controller, eliminating the physical cable that would be disconnected during rotation. This substitution of mechanical connection with electromagnetic signal transmission resolves the reliability issue while maintaining measurement capability.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent extracts the cable from the temperature measurement system by implementing wireless communication. The temperature sensor is integrated into the substrate boat without requiring external cable connections, removing the problematic mechanical link that causes disconnection during rotation.

Inventive Principle:

Principle #2Taking out (Extraction)

2Loss of information

If a cable is routed along the support column and pulled out of the seal cap, then temperature data can be transmitted, but the cable is susceptible to disconnection during rotation

Engineering Contradiction:

Improvetemperature data transmissionVSAvoidrotation operation

Core Design Contradiction:

Loss of informationVSEase of operation

Solution Approach 1:

The patent replaces the mechanical cable routing system with wireless communication. Temperature data is transmitted via wireless signals between the sensor on the substrate boat and the external controller, eliminating the need for cable routing along support columns and through seal caps, thus enabling free rotation without disconnection risks.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Productivity

If the substrate boat is rotated during temperature measurement, then processing efficiency is improved, but cable disconnection occurs preventing rotation

Engineering Contradiction:

Improveprocessing efficiencyVSAvoidcable connection

Core Design Contradiction:

ProductivityVSReliability

Solution Approach 1:

The patent replaces the mechanical cable connection with wireless communication, enabling the substrate boat to be rotated during temperature measurement without cable disconnection. This allows continuous processing operations and improves productivity by eliminating the constraint that prevented rotation.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Data Source

PatentUS12504332B2Substrate temperature sensor, substrate retainer and substrate processing apparatus

Publication Date: 2025.12.23 KOKUSAI DENKI KK

AI summary

According to one aspect of the technique, there is provided a substrate temperature sensor configured to measure a temperature of a substrate, wherein the substrate temperature sensor is provided in a protective pipe provided to be accommodated in a recess formed at a portion of a substrate retainer on which the substrate is mounted.