Wireless Temperature Measurement Wafer for High-Temperature Processing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional temperature measurement wafers face challenges in automation efficiency due to manual operations and communication wire issues, and have limited operational temperature ranges, especially with wireless wafers using batteries and controllers that degrade under high temperatures.
Innovation Solution
A temperature measurement wafer with a wafer body, temperature sensors, a transmission unit, and a battery unit using all-solid-state secondary batteries, enabling wireless data transmission and operation up to higher temperatures, along with a power receiving unit for wireless charging, and a substrate processing system incorporating a standby unit and conveyance mechanism for continuous operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a wired temperature measurement wafer is used, then temperature measurement can be performed, but manual operations are required and communication wires may be bent or disconnected
Solution Approach 1:
The patent extracts and removes the communication wire from the temperature measurement system. The wireless temperature measurement wafer eliminates the physical wire connection between the sensor substrate and communication substrate, replacing it with wireless communication capability built into the wafer body. This resolves the reliability issues of wire bending and disconnection while enabling full automation of the measurement process.
Solution Approach 2:
The patent replaces the mechanical wire-based communication system with a wireless communication system. Instead of using physical wires to transmit data between the sensor and external devices, the wafer incorporates wireless communication circuits that transmit temperature data wirelessly, eliminating mechanical connections and enabling automated operation without manual wire handling.
2Ease of operation
If a wireless temperature measurement wafer with conventional battery is used, then wireless operation is enabled, but the upper limit of operable temperature is low due to battery and electronic device degradation
Solution Approach 1:
The patent changes the operational parameters of the battery by selecting a lithium-ion secondary battery with specific characteristics that can withstand higher temperatures. The battery is designed to operate reliably up to approximately 150°C, and the electronic devices are selected or designed to maintain functionality at these elevated temperatures, thereby extending the upper limit of the operable temperature range while maintaining wireless operation capability.
3Duration of action of moving object
If conventional batteries are used in wireless temperature measurement wafers, then wireless operation is possible, but operational time is limited under high temperature conditions
Solution Approach 1:
The patent optimizes battery parameters by using a lithium-ion secondary battery with high-temperature resistance. The battery's chemical composition and structural parameters are selected to maintain stable performance at elevated temperatures up to 150°C, significantly extending the operational duration under high-temperature conditions compared to conventional batteries that would degrade rapidly.
4Adaptability or versatility
If manual operations are required for loading and disposing temperature measurement wafers, then flexibility is maintained, but measurement efficiency is reduced
Solution Approach 1:
The wireless temperature measurement wafer is designed as a self-contained unit with integrated wireless communication capability. Once placed on the heating plate, the wafer autonomously performs temperature measurement and wirelessly transmits data without requiring manual intervention for wire connection or data retrieval. This self-service capability maintains operational flexibility while dramatically improving measurement efficiency by eliminating repetitive manual tasks.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances automation efficiency, allows real-time temperature data transmission, and extends operational time under high temperatures, ensuring accurate and quick temperature adjustments of heating plates in substrate processing systems.
Implementation Method 1
a battery unit that is disposed on the wafer body and includes an all-solid-state secondary battery that supplies power to each of the temperature sensors and the transmission unit
Implementation Method 2
a transmission unit capable of wirelessly transmitting temperature data detected by the temperature sensors in a state where the wafer body is placed on the temperature measurement subject
Data Source
Figure 1a~1b
Figure 2
Figure 3
AI summary
A temperature measurement wafer (1) includes a temperature sensor (3), a transmission unit (8), and a battery substrate (7). The transmission unit (8) wirelessly transmits temperature data of a temperature measurement subject measured by the temperature sensor (3) to the temperature measurement wafer (1). That is, the temperature measurement wafer (1) wirelessly transmits information to the outside, a decrease in operation efficiency caused by a communication wire can be avoided. The battery substrate (7) supplies power to each of the temperature sensor (3) and the transmission unit (8) using an all-solid-state secondary battery (21). Using the all-solid-state secondary battery (21) makes it possible to operate the temperature measurement wafer (1) without deteriorating its performance even under a higher temperature condition. Thus, the temperature measurement wafer (1) can be used under a higher temperature condition while improving the operation efficiency of the temperature measurement wafer (1).