Wiring Substrate Integrating Silicon Interposer with Resin

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Solution Overview

Problem

The increasing complexity and cost of build-up wiring boards due to the need for finer pitches in high-performance semiconductor chips, along with the introduction of silicon interposers, lead to increased costs and decreased yields, as well as structural warping issues.

Innovation Solution

A wiring substrate is constructed by stacking unit wiring boards with electrical connections via connection terminals, integrating a silicon interposer with a resin portion that fills gaps, allowing for minimal wiring layers and high reliability, using a mold compound resin with silica fillers to suppress warping and enhance rigidity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a build-up wiring board is used with finer pitch wirings to accommodate high-performance semiconductor chips, then the connection capability is improved, but the manufacturing complexity and cost increase

Engineering Contradiction:
Improveconnection capabilityVSAvoidmanufacturing complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The wiring board is divided into a core substrate and multiple unit wiring boards that can be independently manufactured and then stacked. This segmentation allows each unit to be produced with standard processes, avoiding the need to manufacture the entire multi-layer structure with fine-pitch wirings in one complex process.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent transitions from planar wiring expansion to three-dimensional stacking. Instead of adding more wiring layers horizontally, the solution stacks unit wiring boards vertically, each with relatively coarse pitch wirings, to achieve the required connection density without increasing manufacturing complexity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Reliability

If the number of wiring layers is increased to solve wiring pull-out issues, then the wiring connection reliability is improved, but the manufacturing cost increases due to unnecessary symmetric wiring formation

Engineering Contradiction:
Improvewiring connection reliabilityVSAvoidmanufacturing cost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent employs asymmetric wiring configuration where unit wiring boards are stacked with wirings formed only on necessary surfaces. Unlike traditional symmetric designs that require identical wiring on both sides to prevent warping, this design allows asymmetric wiring placement optimized for functional requirements, reducing unnecessary wiring layers and manufacturing cost.

Inventive Principle:
Principle #4Asymmetry

Solution Approach 2:

Different regions of the wiring board structure have different wiring configurations. Unit wiring boards are designed with wirings only where needed for electrical connection, rather than uniform symmetric wiring throughout. This local optimization reduces the total number of wiring layers while maintaining connection reliability.

Inventive Principle:
Principle #3Local quality

3Adaptability or versatility

If a silicon interposer is introduced to enable fine-pitch connections, then the connection capability is improved, but the structural stability deteriorates due to warping

Engineering Contradiction:
Improveconnection capabilityVSAvoidstructural stability
Core Design Contradiction:
Adaptability or versatilityVSStability of the object's composition

Solution Approach 1:

The patent uses a composite structure combining core substrate, unit wiring boards, and resin portions. This composite design distributes thermal and mechanical stresses across different materials with compatible properties, reducing warping. The resin portions act as stress-absorbing elements that compensate for differential expansion between the silicon interposer and other components.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

Resin portions are introduced as intermediary elements between the silicon interposer and unit wiring boards, and between stacked units. These resin portions serve as buffer layers that accommodate thermal expansion differences and mechanical stress, preventing warping while maintaining the fine-pitch connection capability provided by the silicon interposer.

Inventive Principle:
Principle #24Intermediary (Mediator)

4Device complexity

If multiple unit wiring boards are stacked to construct the base wiring board, then the wiring layer number is reduced to necessary minimum, but the manufacturing precision requirements increase

Engineering Contradiction:
Improvewiring layer numberVSAvoidstacking alignment precision
Core Design Contradiction:
Device complexityVSManufacturing precision

Solution Approach 1:

Connection terminals are pre-formed on the unit wiring boards before stacking. These pre-formed terminals serve as alignment guides and mechanical interlocks during the stacking process, ensuring precise positioning without requiring high-precision alignment equipment. The preliminary formation of connection structures simplifies the assembly process.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach reduces the number of unnecessary wiring layers, lowers manufacturing costs, and improves yield while maintaining high reliability by integrating the silicon interposer and base wiring board with a resin portion that approximates thermal expansion coefficients, preventing warping and supporting the structure with high rigidity.

Implementation Method 1

The thermal expansion coefficient of the resin portion is 7 ppm/° C. to 20 ppm/° C., and the elastic modulus is 15 GPa to 25 GPa. By forming the resin portion from such a resin material, the thermal expansion coefficients between the silicon interposer, the base wiring board and the resin portion can be made to approximate rather that the case of where a general resin material is used. Thus, an occurrence of the warping to the wiring substrate can be suppressed.

Methodology Applied
Scientific EffectThermal expansion coefficient matching: Thermal Expansion

Implementation Method 2

a mold compound resin containing a large amount of fillers (epoxy resin containing 85 to 90 percent silica filler as an example) is used as the material of the resin portion

Methodology Applied
Scientific EffectComposite material reinforcement: Composite Materials

Data Source

PatentUS7901986B2Wiring substrate, manufacturing method thereof, and semiconductor device
Publication Date: 2011.03.08 SHINKO ELECTRIC IND CO LTD
  • US7901986B2 patent drawing
  • US7901986B2 patent drawing
  • US7901986B2 patent drawing

AI summary

In a wiring substrate according to the present invention, a base wiring board is constructed by stacking a plurality of unit wiring boards each having wiring patterns which enable an electrical connection between upper and lower sides, in a state that the plurality of unit wiring boards are connected to each other via a connection terminal, and a silicon interposer is stacked on the base wiring board via a connection terminal, and a resin portion is filled in a gap between the plurality of unit wiring boards as well as a gap between the base wiring board and the silicon interposer, and a resin portion serves as a substrate which integrates the base wiring board and the silicon interposer.