Workpiece Carrier Device with Flexible Ring Gear
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Solution Overview
Problem
Existing workpiece carrier devices for vacuum processing are complex in structure and limit the adjustability of the transmission ratio, which can impair the quality of thin-layer coatings due to intermittent rotation and restricted selection of transmission ratios.
Innovation Solution
A workpiece carrier device with a simple structure that allows for adjustable transmission ratios through a rotary frame with a ring gear and toothed wheel mechanism, enabling easy selection of transmission ratios by exchanging central wheels and intermediate gear sets, thereby facilitating efficient and reliable operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a toothed wheel on the workpiece holder engages with a ring gear which is torsionally rigid in relation to the base frame, then the workpiece holder can be rotated, but the structure becomes relatively complex and the transmission ratio is selectable only within fairly narrow limits
Solution Approach 1:
The patent applies the dynamics principle by making the ring gear flexible instead of torsionally rigid. The ring gear is designed with elastic elements that allow it to deform and adapt during operation, enabling continuous adjustment of the transmission ratio while maintaining structural integrity. This dynamic design allows the transmission ratio to be selected across a wide range without requiring complex switching mechanisms between discrete gear sets.
Solution Approach 2:
The patent implements parameter changes by varying the elastic properties and geometric parameters of the ring gear. By changing the stiffness, pre-tension, or dimensional parameters of the elastic elements in the ring gear, the transmission ratio can be continuously adjusted. This allows a single structural design to provide a wide range of transmission ratios without requiring multiple discrete gear sets or complex selection mechanisms.
2Reliability
If drivers anchored to the base frame engage temporarily with workpiece holders, then the workpiece holders can be rotated, but the rotation becomes intermittent which can impair the quality of workpieces
Solution Approach 1:
The patent applies the continuity of useful action principle by ensuring that the ring gear maintains continuous engagement with the workpiece holders throughout the rotation cycle. The flexible ring gear is pre-tensioned to remain in constant contact with the drivers, eliminating intermittent engagement and ensuring smooth, continuous rotation. This continuous action prevents disruptions in the coating process and maintains workpiece quality.
Solution Approach 2:
The patent implements beforehand cushioning by pre-tensioning the elastic elements of the ring gear. This pre-tensioning creates a cushioning effect that maintains constant contact between the ring gear and the drivers, preventing gaps or interruptions in the transmission of rotational motion. The elastic elements absorb variations in load and maintain steady engagement, ensuring reliable and continuous rotation.
3Adaptability or versatility
If an auxiliary gear set directly controls the motion of the driving disc, then the transmission ratio can be influenced, but the structure becomes more complex
Solution Approach 1:
The patent applies the taking out principle by extracting the auxiliary gear set from the system and replacing it with a flexible ring gear mechanism. Instead of using a separate auxiliary gear set to control the driving disc, the transmission ratio adjustment is achieved directly through the elastic deformation and geometric configuration of the ring gear itself. This simplifies the overall structure by eliminating the need for additional gear sets while maintaining full transmission ratio adjustability.
Data Source
AI summary
A workpiece carrier has a base frame, a shaft surrounding a drive axis and a workpiece carrier and includes a rotary frame mounted on the base frame so as to be rotatable about the drive axis, workpiece holders mounted on the rotary frame so as to be rotatable about holding axes, a driving part with a holder mounted so as to be rotatable about the drive axis, a transmission part operationally connected to the rotatably mounted workpiece holders, and an intermediate gear attached to the rotatably mounted holder. The intermediate gear is connected to the shaft and to the transmission part in such a way that the transmission part engages with the driving part so as to be rotatable about an output point that is spaced apart from the drive axis by an eccentricity.