Workpiece Container Layout for Mixed-Size Semiconductor Storage

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Solution Overview

Problem

In semiconductor fabrication facilities, there is a challenge in efficiently storing and transporting various types of workpieces like wafers and photomasks, as existing stockers occupy large space and risk mutual contamination when stored together, and current systems lack efficient storage solutions for different types of workpieces.

Innovation Solution

A workpiece storage system comprising a workpiece container with a supporting structure and workpiece carrier, along with a transport module, identification module, gas distribution module, and control module, which allows for adaptable storage and transport of different types of workpieces by adjusting storage conditions and positions within the container.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If multiple types of workpieces are stored together in existing stockers, then storage space is utilized, but mutual contamination risk increases and storage quality deteriorates

Engineering Contradiction:

Improvestorage space utilizationVSAvoidmutual contamination risk

Core Design Contradiction:

Adaptability or versatilityVSObject-affected harmful factors

Solution Approach 1:

The stocker is divided into multiple independent storage containers, each capable of storing different types of workpieces separately. The supporting structure includes multiple storage containers arranged in layers, with each container forming an isolated storage environment that prevents contamination between different workpiece types while maintaining high space utilization.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Each storage container is equipped with independent environmental control, allowing different storage conditions (temperature, humidity, atmosphere) to be maintained in different containers based on the specific requirements of the workpieces stored therein, thereby preventing contamination and maintaining storage quality.

Inventive Principle:

Principle #3Local quality

2Object-affected harmful factors

If separate stockers are used for different types of workpieces, then contamination is prevented, but storage space efficiency decreases

Engineering Contradiction:

Improvecontamination preventionVSAvoidstorage space efficiency

Core Design Contradiction:

Object-affected harmful factorsVSAdaptability or versatility

Solution Approach 1:

Multiple storage containers are merged into a single integrated stocker system, allowing different types of workpieces to be stored in separate containers within the same stocker. This combines the contamination prevention benefits of separate storage with the space efficiency of an integrated system.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The stocker is designed as a universal storage system that can accommodate multiple types of workpieces simultaneously through its multiple storage containers, each capable of storing different workpiece types under appropriate conditions, thereby achieving both contamination prevention and space efficiency.

Inventive Principle:

Principle #6Universality (Multi-functionality)

3Stability of the object's composition

If workpieces are stored in fixed positions, then storage stability is maintained, but adaptability to different workpiece types decreases

Engineering Contradiction:

Improvestorage stabilityVSAvoidadaptability to different workpiece types

Core Design Contradiction:

Stability of the object's compositionVSAdaptability or versatility

Solution Approach 1:

The supporting structure includes adjustable and movable components that allow storage containers to be repositioned, reconfigured, or removed according to different storage requirements. This dynamic design maintains stability during storage while enabling adaptation to various workpiece types and storage conditions.

Inventive Principle:

Principle #15Dynamics

Data Source

PatentUS11848221B2Method of storing workpiece using workpiece storage system

Publication Date: 2023.12.19 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

AI summary

A method includes disposing, by using a transport module of a workpiece storage system, a first workpiece on a first workpiece carrier; disposing, by using the transport module, the first workpiece carrier with the first workpiece in a workpiece container; disposing, by using the transport module, a second workpiece in the workpiece container, wherein the first workpiece and the second workpiece have different sizes; and transferring, by using the transport module, the workpiece container containing the second workpiece and the first workpiece carrier with the first workpiece to a stocker to store the workpiece container.