Semiconductor Workpiece Holder With Flexing Grippers and Edge Protection
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Solution Overview
Problem
Existing workpiece holders for wet chemical semiconductor processing, particularly those securing only two or three edges of rectangular substrates, risk substrate breakage due to edge contact and are prone to fluid leaks, while four-sided holders with locking mechanisms and O-rings suffer from contamination and inability to place close positioning shields or agitation plates effectively.
Innovation Solution
A workpiece holder design with first and second lateral supports, flexing grippers, and edge protectors that constrain and protect all four edges of a workpiece, using flexible grippers and edge protectors to minimize edge contact and prevent fluid ingress, allowing close positioning of shields and agitation plates.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If workpiece holders contact and constrain only two or three edges of rectangular substrates, then device complexity is reduced, but substrate protection is insufficient leading to edge contact and breakage
Solution Approach 1:
The holder uses asymmetric constraint where two opposite edges are fully constrained by edge protectors while the other two edges use flexing grippers for selective contact, providing unequal but optimized protection based on substrate handling requirements
Solution Approach 2:
The flexing grippers are made of flexible material that can conform to the substrate edge without rigid contact, providing protection while minimizing stress concentration that could cause breakage
2Reliability
If four-sided holders with locking mechanisms and O-rings are used, then substrate protection is improved, but contamination risk increases due to fluid leaks and O-ring contamination
Solution Approach 1:
The design removes O-rings and locking mechanisms from the four-sided holder design, extracting the problematic components that caused contamination while retaining edge protection through alternative mechanisms (flexing grippers and edge protectors without seals)
Solution Approach 2:
The edge protectors are designed as simple, replaceable components without complex sealing mechanisms, effectively treating them as disposable elements that can be easily replaced rather than maintaining complex sealed systems prone to leakage
3Reliability
If four-sided holders with locking mechanisms are used, then substrate protection is improved, but device complexity and contamination risk increase
Solution Approach 1:
The locking mechanisms are completely removed from the holder design, extracting the complex mechanical systems while maintaining substrate protection through the simplified edge protector and flexing gripper system that relies on elastic deformation rather than mechanical locking
4Reliability
If workpiece holders contact substrate edges for securing, then substrate support is improved, but fluid drag-out increases due to contact areas
Solution Approach 1:
The flexing grippers use flexible material that can grip the substrate edge with minimal contact area, reducing the surface area available for fluid adhesion and drag-out while maintaining sufficient mechanical support
5Reliability
If workpiece holders use metal contacts for electrical contact in electroplating, then electrical conductivity is improved, but contamination risk increases due to metal buildup and seed deplating
Solution Approach 1:
The flexing grippers act as an intermediary between the holder and substrate, providing electrical contact through a flexible material interface that reduces direct metal-to-metal contact and minimizes galvanic cell formation at the contact points
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design enhances substrate protection, reduces contamination risk, and improves plating uniformity by allowing close placement of shields and agitation plates, ensuring secure handling and minimal fluid drag-out.
Implementation Method 1
first and second flexing grippers arranged at respective first and second lateral supports, the flexing grippers movable between a closed configuration in which they contact and restrain respective first and second opposing edges of the workpiece
Data Source
AI summary
An apparatus for loading and transport of fragile flexible workpieces for use in wet chemical semiconductor processing is described. A loader aligns a workpiece in a frame while maintaining minimal physical contact. A holder precisely positions at least two edges of the workpiece, while providing workpiece edge protection and straightening on the remaining two edges. The holder allows fluid processing of both faces of the workpiece while allowing a shield or agitation plate to be positioned close to the faces of the workpiece.