Semiconductor Workpiece Orientation Tool for Automated FAB Transfer
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Solution Overview
Problem
In semiconductor fabrication facilities, there is a need for a system that can automatically adjust and correct the orientation of workpieces like reticles and wafers to meet different specifications of various manufacturing tools, as existing systems lack the capability to efficiently and safely transfer workpieces between tools with differing orientation requirements.
Innovation Solution
An automated system comprising an orientation tool with a sensor to detect the orientation of workpieces and a rotation mechanism, integrated with a transporting tool, which automatically adjusts the workpiece orientation by 180 degrees when moving between manufacturing tools to ensure proper alignment for each tool's specific requirements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If workpieces are manually oriented and transferred between manufacturing tools, then orientation accuracy can be maintained, but productivity decreases and manual intervention increases
Solution Approach 1:
The workpiece carrier is equipped with a reflective marker that automatically provides orientation information to the transporting device's detector. The system self-regulates by detecting the marker's orientation and automatically adjusting the carrier's position, eliminating the need for manual intervention while maintaining precision.
Solution Approach 2:
The manual mechanical orientation adjustment is replaced by an automated detection and control system. The transporting device uses an optical detector to read the reflective marker's orientation and automatically adjusts the carrier's angular position, substituting human operation with an automated opto-mechanical system.
2Productivity
If automated transporting devices are used to move workpieces between tools, then productivity increases, but the ability to adapt to different tool orientation requirements decreases
Solution Approach 1:
The transporting device incorporates a rotatable carrier mechanism that can dynamically adjust its angular orientation. The carrier rotates to different angles based on the destination tool's requirements, allowing the automated system to adapt to various orientation specifications while maintaining high transfer efficiency.
Solution Approach 2:
The system uses a detector to read the reflective marker's orientation information and feeds this data back to the control system. Based on this feedback, the transporting device automatically adjusts the carrier's angular position to match the required orientation for the target manufacturing tool.
3Device complexity
If workpiece orientation is not automatically corrected, then system complexity decreases, but manufacturing precision deteriorates due to orientation errors
Solution Approach 1:
A reflective marker is introduced as an intermediary element between the workpiece carrier and the detecting system. This simple passive marker enables the detector to accurately determine the carrier's angular orientation without requiring complex sensors or active components on the carrier itself, thus adding minimal complexity while ensuring precision.
Data Source
AI summary
A system for a semiconductor fabrication facility (FAB) includes an orientation tool and a transporting tool configured to transport at least one customized part. The orientation tool includes a port configured to receive the workpiece, a sensor configured to detect an orientation of the workpiece received in the port and a rotation mechanism configured to turn the workpiece received in the port.