Automated Workpiece Orientation Correction in Semiconductor Fabrication

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Solution Overview

Problem

In semiconductor fabrication facilities, there is a need for an efficient system to automatically adjust and correct the orientation of workpieces like reticles and wafers as they are transported between manufacturing tools, which often require different orientations for proper loading and unloading, leading to inefficiencies in the manufacturing process.

Innovation Solution

An automated system comprising a transporting tool, an orientation tool with a sensor to detect the workpiece orientation, and a rotation mechanism to adjust the workpiece orientation, ensuring it meets the specifications of various manufacturing tools, utilizing a combination of overhead hoist transports and a turntable or robotic arm to rotate the workpieces by 180 degrees when necessary.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If manual orientation adjustment is used for workpieces during transport, then flexibility in handling different tool requirements is improved, but labor intensity and potential for human error increase

Engineering Contradiction:

Improveflexibility in handling different tool requirementsVSAvoidlabor intensity and human error

Core Design Contradiction:

Adaptability or versatilityVSObject-generated harmful factors

Solution Approach 1:

The system enables self-service automation where the workpiece orientation is automatically detected and adjusted without human intervention. The sensor detects the current orientation, the controller determines the required orientation based on tool specifications, and the rotation mechanism automatically corrects any mismatch, making the system self-sufficient in handling orientation requirements.

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

The patent replaces manual mechanical orientation adjustment with an automated system comprising sensors, controllers, and rotation mechanisms. This substitution eliminates human labor while maintaining the ability to adapt to different tool orientation requirements through automated detection and correction.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Productivity

If automated orientation detection and adjustment system is implemented, then productivity and throughput are improved, but device complexity increases

Engineering Contradiction:

Improvethroughput and output rateVSAvoidsystem complexity

Core Design Contradiction:

ProductivityVSDevice complexity

Solution Approach 1:

The system employs universal components that can handle multiple functions: the sensor detects various workpiece orientations, the controller manages different tool requirements, and the rotation mechanism adjusts orientations for different tools. This multi-functionality allows a single integrated system to serve multiple purposes, improving productivity without proportionally increasing complexity.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

The controller acts as an intermediary between the sensor and the rotation mechanism, processing orientation data and determining the appropriate rotation required. This intermediary component simplifies the overall system architecture by centralizing the decision-making logic, thereby managing complexity while enabling automated productivity improvements.

Inventive Principle:

Principle #24Intermediary (Mediator)

3Speed

If workpiece orientation is not corrected, then transport time is reduced, but manufacturing precision and tool compatibility deteriorate

Engineering Contradiction:

Improvetransport timeVSAvoidworkpiece orientation accuracy

Core Design Contradiction:

SpeedVSManufacturing precision

Solution Approach 1:

The system performs preliminary detection of workpiece orientation before transport to the manufacturing tool. By detecting the current orientation in advance and calculating the required rotation, the system prepares the workpiece for correct orientation upon arrival, ensuring manufacturing precision without adding significant transport time.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The automated orientation correction system operates rapidly during the transport process, performing the rotation adjustment in a time-efficient manner. The quick detection and correction mechanism allows the system to rush through the orientation correction step without significantly impacting the overall transport time, thereby maintaining both speed and precision.

Inventive Principle:

Principle #21Skipping (Rushing through)

Data Source

PatentUS20240071799A1System for a semiconductor fabrication facility and method for operating the same

Publication Date: 2024.02.29 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

AI summary

A system for a semiconductor fabrication facility comprises a transporting tool configured to move a carrier, a first manufacturing tool configured to accept the carrier facing in a first direction, a second manufacturing tool configured to accept the carrier facing in the second direction, and an orientation tool. The carrier is moved to the orientation tool by the transporting tool prior to being moved to the first manufacturing tool or the second manufacturing tool by the transporting tool. The orientation tool rotates the carrier so that the carrier is accepted by the first manufacturing tool or the second manufacturing tool. The transporting tool, the first manufacturing tool, the second manufacturing tool and the orientation tool are physically separated from each other.