Workpiece Support Fluid Zones Azimuthal Temperature Control
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Solution Overview
Problem
Existing workpiece supports in process chambers fail to effectively control temperature non-uniformities across the surface of workpieces, particularly due to axisymmetric heating and cooling patterns, which can lead to inefficiencies in processes like semiconductor wafer processing.
Innovation Solution
A workpiece support with a plurality of independently pressurizable fluid zones, positioned at different azimuthal locations on the workpiece-receiving surface, allows for precise temperature control by varying gas pressure in each zone to match the specific thermal flux requirements of the workpiece, using a combination of fluid zones and an electrostatic chuck for enhanced temperature management.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If axisymmetric heating and cooling patterns are used in workpiece supports, then the structure is simple and easy to manufacture, but temperature non-uniformities across the workpiece surface cannot be effectively controlled
Solution Approach 1:
The workpiece support surface is divided into multiple independently controllable zones (e.g., central zone, intermediate zones, peripheral zones) with distinct heating and cooling capabilities. Each zone can be independently adjusted to compensate for temperature non-uniformities across the workpiece surface, transforming a single uniform temperature control system into a multi-zone differential control system.
Solution Approach 2:
Different regions of the workpiece support are equipped with different thermal control characteristics. The central region, intermediate regions, and peripheral regions have independently adjustable heating and cooling rates, allowing each local area to be optimized for its specific thermal requirements rather than applying a uniform control strategy across the entire surface.
2Temperature
If multiple independently pressurizable fluid zones are implemented at different azimuthal locations, then precise temperature control is achieved, but the device complexity increases
Solution Approach 1:
The fluid control system is segmented into multiple independently pressurizable zones arranged at different azimuthal locations around the workpiece support. Each zone has its own pressure control mechanism, allowing precise local temperature adjustment without requiring a completely separate control system for each zone.
Solution Approach 2:
A fluid medium (gas or liquid) is used as an intermediary to transfer thermal energy between the workpiece support and the workpiece. By controlling the pressure and flow of this fluid in different azimuthal zones, precise temperature control is achieved without direct mechanical contact or complex heating/cooling elements in each zone.
3Temperature
If fluid zones are used to control temperature, then temperature uniformity is improved, but the system requires additional fluid supply infrastructure
Solution Approach 1:
The fluid supply system serves multiple functions simultaneously: it provides thermal control to multiple zones, acts as a sealing medium between the workpiece and support, and can be used for workpiece positioning. This multi-functionality reduces the need for separate systems and minimizes overall infrastructure requirements.
Solution Approach 2:
The heating, cooling, sealing, and positioning functions are merged into a single fluid-based system. The same fluid zones that provide thermal control also serve as seals and positioning mechanisms, eliminating the need for separate systems and reducing overall complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables uniform and controlled temperature distribution across the workpiece surface, addressing non-uniform thermal flux issues and improving the efficiency of processes like chemical vapor deposition and plasma etching by allowing for both radial and azimuthal temperature control.
Implementation Method 1
a plurality of fluid zones that supply a fluid, such as a gas, in between the workpiece support and the workpiece for affecting the temperature of the workpiece within the zones
Implementation Method 2
using a combination of fluid zones and an electrostatic chuck for enhanced temperature management
Data Source
AI summary
A workpiece support is disclosed defining a workpiece-receiving surface. The workpiece support includes a plurality of fluid zones. A fluid, such as a gas, is fed to the fluid zones for contact with a workpiece on the workpiece support. The fluid can have selected thermoconductivity characteristics for controlling the temperature of the workpiece at particular locations. In accordance with the present disclosure, at least certain of the fluid zones are at different azimuthal positions. In this manner, the temperature of the workpiece can be adjusted not only in a radial direction but also in an angular direction.