Workpiece Table Position Correction for Droplet Landing Precision
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Solution Overview
Problem
In high-precision workpiece processing applications, such as droplet ejecting apparatuses for large and high-definition products, positional deviations due to environmental changes and mechanical factors lead to inaccuracies, necessitating robust correction of the workpiece table's position to maintain alignment with the processor.
Innovation Solution
A workpiece processing apparatus equipped with a workpiece table, a processor, a movement mechanism, a position measuring device, a detector, and a corrector that calculates and applies positional corrections based on real-time measurements and detection data to align the workpiece table relative to the processor, addressing deviations caused by temperature changes, structural deformations, and other factors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the workpiece table is made movable and adjustable for alignment, then workpiece alignment accuracy is improved, but positional deviations occur due to environmental changes and mechanical factors
Solution Approach 1:
The system continuously measures the actual position of the workpiece table using a position measuring device (such as a linear scale) and compares it with the commanded position. The corrector then calculates the deviation and generates correction commands to compensate for positional errors, creating a closed-loop feedback control system that maintains position accuracy despite environmental changes and mechanical variations
Solution Approach 2:
The system replaces purely mechanical positioning with a hybrid system that incorporates optical or electromagnetic measurement devices (such as laser interferometers or encoders) to detect position. This substitution allows for non-contact, high-precision measurement and correction of positional deviations without relying solely on mechanical rigidity
2Manufacturing precision
If the workpiece table position is corrected based on multiple measurement points, then manufacturing precision is improved, but device complexity increases
Solution Approach 1:
The workpiece table position is divided into multiple discrete measurement points or degrees of freedom (such as X, Y, Z positions and rotational angles). Each point is measured and corrected independently, allowing the system to handle complex positional deviations through a series of simpler, manageable correction operations rather than attempting to correct all deviations simultaneously
Solution Approach 2:
The corrector acts as an intermediary computational unit that receives raw position data from the position measuring device, processes the information to calculate deviation amounts, and generates corrected position commands. This intermediary layer simplifies the overall system architecture by separating measurement, computation, and actuation functions
Data Source
AI summary
Disclosed is a workpiece processing apparatus that performs a predetermined processing on a workpiece. The workpiece processing apparatus includes: a workpiece table configured to place the workpiece thereon; a processor configured to process the workpiece placed on the workpiece table; a movement mechanism configured to relatively move the workpiece table and the processor; a position measuring device configured to measure a position of the movement mechanism; a detector configured to detect a position of the workpiece placed on the workpiece table; and a corrector configured to calculate a positional correction amount of the workpiece table based on a measurement result of the position measuring device and a detection result of the detector.