Workpiece Dividing Tape Orientation for Uniform Adhesion
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Solution Overview
Problem
The challenge in dividing workpieces with devices on the front surface is that the stretch rate of tapes applied to follow the recessed/protruding shape of the workpiece is anisotropic, leading to poor adhesion near dividing lines and potential damage to the holding table, especially when cutting from the back surface.
Innovation Solution
A method involving the integration of a workpiece with an annular frame using a tape with controlled anisotropy, where the tape is applied at a specific angle to minimize non-adhesion regions, followed by cutting from the back surface along planned dividing lines.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a tape is applied to follow the recessed/protruding shape of the workpiece front surface, then the workpiece can be held securely and integrated with the annular frame, but the anisotropic stretch rate of the tape causes poor adhesion near the dividing lines
Solution Approach 1:
The patent applies asymmetric orientation by aligning the tape's tensile direction (direction of lowest stretch rate) with the radial direction from the center of the workpiece. This asymmetric alignment ensures that the tape experiences minimal stretching in the radial direction while allowing controlled stretching in the circumferential direction, resulting in uniform adhesion across the entire workpiece surface including areas near the dividing lines.
Solution Approach 2:
The patent changes the orientation parameter of the tape application by specifying that the tensile direction of the tape should be aligned with the radial direction. This parameter change optimizes the tape's mechanical behavior during application, ensuring that the anisotropic stretch characteristics produce uniform adhesion rather than the non-uniform adhesion that occurs with conventional alignment methods.
2Productivity
If the cutting blade penetrates the workpiece from the back surface side, then dividing can be performed along the planned dividing lines, but the holding table may be cut and damaged
Solution Approach 1:
The patent uses the tape as an intermediary protective layer between the cutting blade and the holding table. The tape is applied to cover the front surface of the workpiece and extends to the back surface, creating a protective barrier that prevents the cutting blade from directly contacting and damaging the holding table while still allowing the cutting operation to proceed efficiently.
Solution Approach 2:
The patent applies the tape to the workpiece before the cutting operation to provide beforehand cushioning and protection. This preparatory measure ensures that when the cutting blade penetrates the workpiece from the back surface, the tape is already in place to prevent damage to the holding table, eliminating the need for reactive damage control measures.
3Shape
If the tape stretch rate is anisotropic when following the recessed/protruding shape, then the tape can conform to the workpiece surface, but non-adhesion regions occur near the boundary between dividing lines and device regions
Solution Approach 1:
The patent applies asymmetric orientation by aligning the tape's tensile direction with the radial direction from the workpiece center. This asymmetric alignment exploits the anisotropic stretch characteristics of the tape to achieve both good surface conformity and uniform adhesion, whereas conventional symmetric or arbitrary alignment causes non-adhesion regions near the dividing lines.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces the non-adhesion regions and enhances processing quality by ensuring uniform tape adhesion, preventing damage to the holding table and improving the cutting process.
Implementation Method 1
a first work unit forming step of forming a first work unit in which the workpiece and a first annular frame are integrated by sticking a first tape
Implementation Method 2
a dividing step of dividing the workpiece by the cutting blade from the side of the back surface along each of the plurality of first planned dividing lines and each of the plurality of second planned dividing lines
Data Source
AI summary
A tape is stuck to the front surface of a workpiece in such a manner that the direction in which the stretch rate becomes the lowest when a predetermined force is applied to the tape is non-parallel to each of multiple planned dividing lines extending in a lattice manner. In this case, each of the multiple planned dividing lines does not extend along the direction perpendicular to this direction. This can reduce the ratio of the region to which the tape does not stick in the front surface of the workpiece in the vicinity of the boundary between each of the multiple planned dividing lines and a region in which a device is formed and suppress deterioration of the processing quality when the workpiece is divided from the back surface side by a cutting blade.