Workpiece Holding Tool Flow Channel Insulation Against Plasma Discharge
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Solution Overview
Problem
Existing workpiece holding tools for semiconductor manufacturing face challenges with electric discharge during high-power plasma processing, as conventional insulation methods fail to effectively prevent discharge in the base's flow channel when using higher power plasma.
Innovation Solution
A workpiece holding tool with a substrate and base configuration that includes a cylindrical member with a cylindrical body and extension portion, which covers the inner peripheral surfaces of the flow channel to reduce electric discharge by directing plasma generating gas through the cylindrical member and into the substrate's through-holes, thereby minimizing contact with the base's inner walls.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional insulation methods are used in the base's flow channel, then the structure is simple, but electric discharge occurs during high-power plasma processing
Solution Approach 1:
An insulating cylindrical member is introduced as an intermediary element within the flow channel. This cylindrical member is positioned to cover the inner peripheral surface of the flow channel, acting as a mediator between the plasma generating gas and the base's conductive walls, thereby preventing electric discharge without requiring fundamental changes to the flow channel structure
Solution Approach 2:
The insulating cylindrical member is selectively placed only in the regions where electric discharge is most likely to occur (along the flow channel's inner peripheral surface). This localized insulation approach provides effective discharge prevention only where needed, rather than insulating the entire flow channel structure
2Reliability
If plasma generating gas flows directly through the base's flow channel, then the structure is simple, but electric discharge occurs during high-power plasma processing
Solution Approach 1:
The insulating cylindrical member serves as a mediator that redirects the plasma generating gas flow. The gas now flows through the space surrounding the cylindrical member rather than directly contacting the base's conductive walls, preventing discharge while maintaining the gas delivery function
Solution Approach 2:
The flow channel's internal space is segmented by the insulating cylindrical member, creating distinct flow regions. The plasma generating gas flows in the annular space between the cylindrical member and the flow channel wall, separating the gas path from potential discharge points on the base structure
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces electric discharge in the base and substrate, even with higher power plasma, by ensuring the plasma generating gas flows through the cylindrical member and into the substrate's through-holes, preventing discharge and enhancing insulation.
Implementation Method 1
directing plasma generating gas through the cylindrical member
Data Source
AI summary
A workpiece holding tool includes a substrate, a base, and a cylindrical member. The base includes a gas flow channel including a first portion and a second portion. The first portion extends parallel to a bonding surface of the base. The second portion forms branch connection with the first portion and extends perpendicularly to the bonding surface to be open in the bonding surface. The cylindrical member includes a cylindrical body portion located along the second portion and a cylindrical extension portion continuous with the body portion and extending to the first portion.