Parallel Writing Data Processing Control Apparatus Error Recovery
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Solution Overview
Problem
In electron beam pattern writing apparatuses, processing errors in parallel processing units can lead to incomplete pattern formation, resulting in inefficiencies and increased writing time, as errors can cause specific processing units to be separated from the system, disrupting the parallel processing workflow.
Innovation Solution
A writing data processing control apparatus that detects errors in parallel processing units, separates the faulty units from the processing workflow, and reassigned tasks to other units, allowing continuous data conversion and writing without user intervention, thereby maintaining efficiency and reducing downtime.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If parallel processing is performed using multiple processing apparatuses, then processing speed and productivity are improved, but system reliability deteriorates because a conversion error in any apparatus causes complete writing failure
Solution Approach 1:
The patent divides the processing system into multiple independent processing apparatuses (first processing apparatus and second processing apparatus), each capable of independently converting writing data. This segmentation allows parallel processing while isolating errors to specific segments, preventing system-wide failure and enabling continued operation through alternative apparatuses when errors occur.
2Reliability
If a processing apparatus with error is separated from the system, then system reliability is improved, but loss of time occurs requiring user intervention and reconfiguration
Solution Approach 1:
The control apparatus automatically detects conversion errors, identifies the faulty processing apparatus, and reassignes its processing tasks to other available apparatuses without requiring user intervention. This self-service mechanism eliminates downtime by continuously maintaining operational capacity through dynamic task redistribution.
Solution Approach 2:
The system implements continuous monitoring and feedback mechanisms where the control apparatus receives status information from all processing apparatuses, detects errors in real-time, and automatically adjusts task allocation. This feedback loop ensures immediate response to failures, maintaining system reliability while minimizing interruption time.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution ensures efficient processing of writing data by providing redundancy and allowing real-time diagnosis and recovery of faulty units, preventing delays in the conversion and writing processes, thus enhancing the robustness and speed of the electron beam pattern writing process.
Implementation Method 1
the electron beam 330 that left a charged particle source 430 and has passed through the opening 411 is deflected by a deflector. Then, the electron beam 330 passes through a part of the variable-shaped opening 421 of the second aperture plate 420, and irradiates a target workpiece 340
Data Source
AI summary
A writing data processing control apparatus includes an assignment part configured to assign processing of a plurality of pieces of writing data of predetermined divided writing regions, stored in a storage device, one by one to one of a plurality of processing apparatuses in which processing is performed in parallel, and a separation part configured, when a processing error occurred as a result of processing of writing data read from the storage device by a first processing apparatus assigned, to separate the first processing apparatus in which the processing error occurred from assigning targets of subsequent writing data processing, wherein the assignment part reassigns the processing of the writing data in which the processing error occurred to a second processing apparatus being different from the first processing apparatus.