X-Ray Modeling for Non-Destructive 3D Structural Profiling
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Solution Overview
Problem
Current techniques for profiling three-dimensional structures in specimens are destructive and not suitable for high-volume manufacturing, necessitating the development of non-destructive methods for characterizing internal structures.
Innovation Solution
A system utilizing an electron beam source and X-ray detector to project e-beams at varying energies, sense emitted X-rays, and process measurement data to estimate structural parameters through a combination of ground truth and computer simulations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If destructive techniques (extraction of lamellas, shaving off slices) are used for profiling specimens, then measurement precision of three-dimensional internal structures is improved, but the specimen is damaged and the process is not suitable for high-volume manufacturing
Solution Approach 1:
The patent replaces destructive mechanical extraction methods with non-destructive X-ray based measurement. The system uses X-ray detectors to capture transmission images of the specimen without physically removing or damaging any material, thereby eliminating the harmful mechanical extraction process while maintaining measurement capability
Solution Approach 2:
The patent introduces X-ray imaging as an intermediary measurement method. Instead of directly extracting and examining physical slices, the system uses X-rays as a mediator to obtain transmission images that reveal three-dimensional internal structures, enabling non-contact and non-destructive measurement
2Loss of information
If destructive extraction methods are used to obtain three-dimensional data, then internal structure information is obtained, but manufacturing throughput is reduced due to time-consuming processes
Solution Approach 1:
The patent replaces time-consuming mechanical extraction and preparation processes with rapid X-ray imaging. The X-ray system can capture transmission images quickly without the need for physical sectioning, mounting, and examination of extracted lamellas, significantly reducing measurement time and increasing manufacturing throughput
Solution Approach 2:
The patent performs measurement on the specimen in its original state before any destructive processing would occur. By obtaining three-dimensional internal structure information through X-ray transmission imaging prior to any manufacturing steps, the system eliminates the need for subsequent destructive extraction and analysis
3Productivity
If non-destructive X-ray measurement is used, then specimen integrity is maintained and high-volume manufacturing is enabled, but measurement precision and accuracy of structural parameters may be compromised
Solution Approach 1:
The patent creates a digital copy or model of the specimen's three-dimensional internal structure through X-ray transmission imaging. The system processes the transmission images to generate accurate representations of internal features, enabling precise measurement of structural parameters without physical contact with the actual specimen
Solution Approach 2:
The patent uses X-ray transmission images as an intermediary representation of the specimen's internal structure. By processing these images through appropriate algorithms, the system extracts accurate structural parameter information while maintaining specimen integrity, achieving both non-destructive measurement and high precision
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables non-destructive, high-volume characterization of three-dimensional structures by accurately estimating structural parameters, reducing the need for destructive physical measurements and time-consuming processes.
Implementation Method 1
measurement of characteristic X-rays emitted from a specimen due to impinging of e-beams thereon
Implementation Method 2
an X-ray detector for sensing X-rays emitted from the tested specimen
Data Source
AI summary
A system for non-destructive characterization of specimens that includes an electron beam (e-beam) source for projecting e-beams at one or more e-beam landing energies on a specimen; an X-ray detector for sensing X-rays emitted from the specimen, thereby obtaining measurement data; and processing circuitry configured to: (i) extract from the measurement data key features specified by a vector {right arrow over (f)}key; and (ii) estimate values {right arrow over (p)} of one or more structural parameters, characterizing the specimen, based on {right arrow over (f)}key and a set of vectors of ground truth (GT) and simulated key features {{right arrow over (f)}n}n=1N. Each of the {right arrow over (f)}n is a product of GT measurements or of computer simulations of emission of X-rays from a respective GT or simulated specimen due to impinging thereof with e-beams at each of the one or more landing energies.