XBAR Ladder Filter Structure for 5G Band Frequency Separation

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Solution Overview

Problem

Existing RF filters are not well-suited for the higher frequencies and bandwidths required by future communications networks, particularly in 5G NR and Wi-Fi bands, due to limitations in frequency separation and performance of current acoustic wave resonators.

Innovation Solution

The use of Transversely-Excited Film Bulk Acoustic Resonators (XBARs) with specific diaphragm thicknesses and dielectric layers to achieve the necessary frequency separation and performance in ladder filter architectures, utilizing shear acoustic modes for improved electromechanical coupling.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If conventional acoustic wave resonators (SAW, BAW, FBAR) are used, then the filters can operate at current communication frequencies, but they cannot achieve the higher frequencies and bandwidths required for future 5G NR and Wi-Fi bands

Engineering Contradiction:
Improveoperating frequencyVSAvoidfrequency separation performance
Core Design Contradiction:
SpeedVSReliability

Solution Approach 1:

The patent changes the fundamental operating parameters of the resonator by transitioning from surface acoustic wave (SAW) or bulk acoustic wave (BAW) modes to transverse electric (TE) mode resonators. This parameter change enables operation at higher frequencies (3 GHz to 30 GHz and beyond) while achieving the required frequency separation and bandwidth performance for 5G NR and Wi-Fi bands that conventional resonators cannot provide

Inventive Principle:
Principle #35Parameter changes

2Adaptability or versatility

If existing acoustic resonator technologies are used, then the filter structure is relatively simple, but they are not well-suited for higher frequencies and bandwidths proposed for future communications networks

Engineering Contradiction:
Improvesuitability for future communication bandsVSAvoidresonator structure complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent replaces conventional mechanical acoustic wave propagation mechanisms (SAW, BAW, FBAR) with a transverse electric mode resonator system that uses dielectric resonators and waveguide structures. This substitution enables the system to achieve the required adaptability for future communication bands (5G NR n77, n79, Wi-Fi 6E, millimeter wave) while maintaining a manageable structural complexity through standardized resonator designs

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Productivity

If wider communication channel bandwidths are implemented, then higher data rates are achieved, but frequency separation and rejection performance become more difficult to maintain

Engineering Contradiction:
Improvedata rateVSAvoidfrequency separation precision
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent transitions from two-dimensional surface acoustic wave propagation to three-dimensional transverse electric mode resonance within dielectric resonators. This dimensional change provides additional degrees of freedom for frequency control and separation, enabling the maintenance of precise frequency separation and rejection performance even when implementing wider communication channel bandwidths for higher data rates

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

XBARs provide high-frequency capability and improved frequency separation, enabling effective filtering in 5G NR and Wi-Fi bands with reduced spurious modes and enhanced performance parameters.

Implementation Method 1

A microwave signal applied to the IDT excites a shear primary acoustic wave in the piezoelectric diaphragm

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

XBAR resonators provide very high electromechanical coupling and high frequency capability

Methodology Applied
Scientific EffectAcoustic wave resonance: Resonance

Data Source

PatentUS20250211204A1Filter using transversely-excited film bulk acoustic resonators
Publication Date: 2025.06.26 MURATA MFG CO LTD
  • US20250211204A1 patent drawing
  • US20250211204A1 patent drawing
  • US20250211204A1 patent drawing

AI summary

A bandpass filter is provided that includes a ladder filter circuit having series and shunt transversely-excited film bulk acoustic resonators (XBARs). The series XBAR includes a lithium niobate piezoelectric layer; and a front side dielectric layer that comprises a silicon oxide between interleaved fingers of an interdigital transducer of the series XBAR disposed on the lithium niobate piezoelectric layer of the series XBAR. Similarly, the shunt XBAR includes a lithium niobate piezoelectric layer; and a front side dielectric layer that comprises a silicon oxide between interleaved fingers of an interdigital transducer of the shunt XBAR disposed on the lithium niobate piezoelectric layer of the shunt XBAR.