XBAR Ladder Filter Using LiNbO3 and Rotated LiTaO3 for Low TCF

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Solution Overview

Problem

Current RF filters using acoustic wave resonators are not well-suited for higher frequency communications bands, such as those proposed for future wireless networks, due to limitations in performance parameters like insertion loss, rejection, and temperature coefficient of frequency (TCF).

Innovation Solution

The use of transversely-excited film bulk acoustic resonators (XBARs) made from lithium niobate and lithium tantalate piezoelectric materials, which offer high electromechanical coupling and low TCF, allowing for the design of filters with wide bandwidth and improved temperature stability by combining the features of both materials in a single filter structure.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional acoustic wave resonators are used, then the filter structure is simple and easy to manufacture, but the filter performance is insufficient for higher frequency bands with limited bandwidth and poor temperature stability

Engineering Contradiction:
Improvetemperature stabilityVSAvoidfilter structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent employs composite piezoelectric material structures, specifically combining lithium niobate and lithium tantalate layers to create XBAR resonators. This composite approach leverages the high electromechanical coupling of lithium niobate with the low TCF of lithium tantalate, achieving superior temperature stability and bandwidth performance that neither material could provide alone in higher frequency bands.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The patent utilizes controlled rotation of the piezoelectric crystal cut angles (e.g., YX-cut orientations) to optimize the temperature coefficient of frequency and electromechanical coupling characteristics. By adjusting these crystalline orientation parameters, the filter achieves improved temperature stability and bandwidth while maintaining compatibility with standard manufacturing processes.

Inventive Principle:
Principle #35Parameter changes

2Speed

If higher frequency bands are targeted, then wider communication bandwidth is achieved, but existing resonator technologies suffer from increased insertion loss and reduced Q-factor

Engineering Contradiction:
Improveoperating frequencyVSAvoidinsertion loss
Core Design Contradiction:
SpeedVSLoss of energy

Solution Approach 1:

The composite lithium niobate-lithium tantalate structure provides high electromechanical coupling coefficients that compensate for increased energy loss at higher frequencies. The lithium niobate layer contributes strong piezoelectric coupling while the lithium tantalate layer reduces temperature-dependent losses, together enabling low insertion loss operation in millimeter-wave bands.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The XBAR resonator design utilizes bulk acoustic wave modes with specific vibration patterns confined within the piezoelectric film thickness. This mechanical resonance approach, combined with the high coupling of the composite materials, maintains high Q-factors and low insertion loss even at elevated operating frequencies where conventional SAW and BAW resonators degrade.

Inventive Principle:
Principle #18Mechanical vibration

3Adaptability or versatility

If wider bandwidth filters are designed, then more frequency channels are supported, but temperature coefficient of frequency increases leading to poor frequency stability

Engineering Contradiction:
ImprovebandwidthVSAvoidfrequency stability
Core Design Contradiction:
Adaptability or versatilityVSStability of the object's composition

Solution Approach 1:

The patent combines lithium niobate with its high electromechanical coupling (enabling wide bandwidth) with lithium tantalate's low temperature coefficient of frequency (providing frequency stability). This composite structure allows the filter to maintain stable center frequency across temperature variations while supporting wide operational bandwidth for multiple frequency channels.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the creation of high-performance RF filters capable of operating in higher frequency bands with reduced frequency shifts due to temperature changes, enhancing the performance of wireless communication systems by providing wider bandwidth and improved reliability.

Implementation Method 1

transversely-excited film bulk acoustic resonators (XBARs) made from lithium niobate and lithium tantalate piezoelectric materials

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

acoustic wave resonators including surface acoustic wave (SAW) resonators, bulk acoustic wave (BAW) resonators, film bulk acoustic wave resonators (FBAR)

Methodology Applied
Scientific EffectAcoustic wave generation: Acoustics

Data Source

PatentUS11996825B2Filter using lithium niobate and rotated lithium tantalate transversely-excited film bulk acoustic resonators
Publication Date: 2024.05.28 MURATA MFG CO LTD
  • US11996825B2 patent drawing
  • US11996825B2 patent drawing
  • US11996825B2 patent drawing

AI summary

Acoustic filters are disclosed. A bandpass filter has a passband between a lower band edge and an upper band edge. The bandpass filter includes a plurality of transversely-excited film bulk acoustic resonators (XBARs) connected in a ladder filter circuit. The plurality of XBARs includes at least one lithium tantalate (LT) XBAR and at least one lithium niobate XBAR. Each of the at least one LT XBAR includes an LT piezoelectric plate with Euler angles (0°, β, 0°), where β is greater than zero and less than or equal to 40 degrees.