XBAR IDT Aperture Layout for Reduced Acoustic Coupling

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Solution Overview

Problem

Current RF filters using acoustic wave resonators are not well-suited for higher frequencies and wider bandwidths required in future communication networks, particularly for 5G NR and Wi-Fi bands, due to high acoustic coupling that complicates designing narrow filters.

Innovation Solution

The use of Shear-Mode Film Transversely-Excited Film Bulk Acoustic Resonators (XBARs) with a reduced aperture in the interdigital transducer (IDT) to decrease acoustic coupling, improving mechanical reliability and maintaining insignificant loss, and employing rotated YX-cut lithium niobate for higher electromechanical coupling and lower losses.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If conventional acoustic wave resonators are used for high-frequency applications, then frequency coverage is improved, but acoustic coupling increases making narrow filter design difficult

Engineering Contradiction:
Improvefrequency coverageVSAvoidacoustic coupling
Core Design Contradiction:
SpeedVSDevice complexity

Solution Approach 1:

The patent changes the aperture parameter of the IDT from conventional dimensions to a reduced aperture (less than or equal to 4 times the pitch of interleaved fingers). This parameter change directly reduces acoustic coupling between resonators while maintaining high-frequency operation capability, enabling narrow filter design at frequencies suitable for 5G and Wi-Fi applications

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs rotated YX-cut lithium niobate material which provides dynamic electromechanical coupling characteristics. This material choice enables the resonator to maintain high electromechanical coupling for signal transmission while the reduced IDT aperture dynamically controls acoustic coupling to adjacent resonators, resolving the contradiction between frequency coverage and filter complexity

Inventive Principle:
Principle #15Dynamics

2Device complexity

If IDT aperture is reduced to decrease acoustic coupling, then filter design flexibility is improved, but signal loss may increase

Engineering Contradiction:
Improvefilter design flexibilityVSAvoidsignal loss
Core Design Contradiction:
Device complexityVSLoss of energy

Solution Approach 1:

The patent optimizes the IDT aperture parameter to a specific range (less than or equal to 4 times the pitch of interleaved fingers) where the balance between acoustic coupling reduction and signal loss minimization is achieved. This precise parameter control allows reduced acoustic coupling for flexible filter design while maintaining acceptable signal transmission levels

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent uses rotated YX-cut lithium niobate, a specialized piezoelectric material with superior electromechanical coupling properties. This material compensates for the potential signal loss from reduced IDT aperture by providing higher intrinsic electromechanical coupling, thereby maintaining signal strength while enabling reduced acoustic coupling through the smaller aperture

Inventive Principle:
Principle #40Composite materials

3Power

If rotated YX-cut lithium niobate is used for higher electromechanical coupling, then signal transmission is improved, but manufacturing complexity increases

Engineering Contradiction:
Improveelectromechanical couplingVSAvoidmanufacturing complexity
Core Design Contradiction:
PowerVSEase of manufacture

Solution Approach 1:

The patent specifies a particular crystal cut orientation (rotated YX-cut) of lithium niobate that provides optimized electromechanical coupling for the intended application. While this specific cut angle requires precise manufacturing control, it enables the high electromechanical coupling necessary for effective signal transmission in high-frequency resonators

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the design of filters with reduced layout footprint and improved mechanical reliability, effectively handling high-frequency applications like the n79 band and 5 GHz frequencies with minimal signal loss, enhancing filter performance for future communication systems.

Implementation Method 1

high piezoelectric coupling between the IDT and the plate

Methodology Applied
Scientific EffectPiezoelectric coupling: Piezoelectric Effect

Implementation Method 2

bulk acoustic resonances in a piezoelectric plate

Methodology Applied
Scientific EffectResonance: Resonance

Data Source

PatentUS20230246631A1Transversely-excited film bulk acoustic resonator for reduced YX-cut piezoelectric coupling
Publication Date: 2023.08.03 MURATA MFG CO LTD
  • US20230246631A1 patent drawing
  • US20230246631A1 patent drawing
  • US20230246631A1 patent drawing

AI summary

A filter may include a substrate and a rotated YX-cut piezoelectric plate coupled to the substrate. The filter also may include an interdigital transducer (IDT) formed on a portion of the rotated YX-cut piezoelectric plate forming a diaphragm that spans a cavity between the rotated YX-cut piezoelectric plate and the substrate. The IDT includes interleaved fingers that are disposed on the diaphragm. The IDT has an aperture that is less than or equal to 4 times a pitch of the interleaved fingers.