XBAR Matrix Filter Architecture for Wideband 5G RF Filtering

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Solution Overview

Problem

Current RF filters using acoustic wave resonators are not well-suited for higher frequencies and wider bandwidths required in future communication networks, such as the 5G NR standard, which necessitates the development of more effective filtering solutions for frequencies above 3 GHz.

Innovation Solution

The use of Transversely-Excited Film Bulk Acoustic Resonators (XBARs) with interdigital transducers on a thin piezoelectric diaphragm, which provide high electromechanical coupling and frequency capability, is employed in matrix filter architectures to achieve improved performance across a broader frequency range.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If conventional acoustic wave resonators (SAW, BAW, FBAR) are used in RF filters, then the filters can operate at standard frequencies, but they cannot achieve the higher frequencies and wider bandwidths required for future communication networks above 3 GHz

Engineering Contradiction:
Improvefrequency capabilityVSAvoidperformance suitability
Core Design Contradiction:
SpeedVSReliability

Solution Approach 1:

The patent changes the fundamental operating parameters of the resonator by transitioning from longitudinal wave modes to shear wave modes in a transversely excited configuration. This parameter change enables the resonator to operate at higher frequencies (above 3 GHz) while maintaining the desired filter performance characteristics, directly resolving the frequency capability limitation of conventional resonators

Inventive Principle:
Principle #35Parameter changes

2Adaptability or versatility

If conventional acoustic wave resonators are used, then the filter design is simpler, but the bandwidth and frequency capabilities are insufficient for 5G NR and other high-frequency communication standards

Engineering Contradiction:
Improvebandwidth capabilityVSAvoidresonator structure complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent employs a transversely excited film bulk acoustic resonator configuration where the excitation direction is perpendicular to the propagation direction of the acoustic wave. This dynamic configuration allows the resonator to achieve wider bandwidth operation and higher frequency capability compared to conventional longitudinally excited resonators, while the floating piezoelectric layer provides mechanical flexibility for optimized performance

Inventive Principle:
Principle #15Dynamics

3Speed

If higher frequency operation is achieved using conventional resonators, then the frequency capability improves, but the electromechanical coupling and overall filter performance deteriorate

Engineering Contradiction:
Improveoperating frequencyVSAvoidelectromechanical coupling efficiency
Core Design Contradiction:
SpeedVSLoss of energy

Solution Approach 1:

The patent utilizes shear horizontal acoustic waves excited in a floating piezoelectric layer by interdigital transducers. The mechanical vibration mode is specifically chosen to maximize electromechanical coupling efficiency at high frequencies. The shear wave configuration provides strong coupling between the electrical and mechanical domains, resolving the energy loss issue that plagues conventional resonators operating at high frequencies

Inventive Principle:
Principle #18Mechanical vibration

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

XBAR-based matrix filters offer enhanced performance by achieving better bandwidth and frequency capabilities, enabling effective filtering in higher frequency communication bands, including those defined by the 5G NR standard, with improved rejection and insertion loss characteristics.

Implementation Method 1

A microwave signal applied to the IDT excites a shear primary acoustic wave in the piezoelectric diaphragm

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

The XBAR is an acoustic resonator structure for use in microwave filters... provide high electromechanical coupling and high frequency capability

Methodology Applied
Scientific EffectElectromechanical coupling: Piezoelectric Effect

Data Source

PatentUS11405019B2Transversely-excited film bulk acoustic resonator matrix filters
Publication Date: 2022.08.02 MURATA MFG CO LTD
  • US11405019B2 patent drawing
  • US11405019B2 patent drawing
  • US11405019B2 patent drawing

AI summary

Radio frequency filters. A radio frequency filter includes a substrate attached to a piezoelectric plate, portions of the piezoelectric plate forming a plurality of diaphragms spanning respective cavities in the substrate. A conductor pattern formed on the piezoelectric plate includes a plurality of interdigital transducers (IDTs) of a respective plurality of resonators, interleaved fingers of each IDT disposed on a respective diaphragm of the plurality of diaphragms. The conductor pattern connects the plurality of resonators in a matrix filter circuit including a first sub-filter and a second sub-filter, each sub-filter comprising two or more resonators from the plurality of resonators.