Non-elongated xMR Sensor Structure for Angle Accuracy

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Solution Overview

Problem

Magnetoresistive IC angle sensors face limitations due to magnetic anisotropy and hysteresis effects, particularly at the edge regions, leading to accuracy issues and increased chip size and cost when attempting to reduce anisotropy effects.

Innovation Solution

The development of non-elongated xMR structures with strategically placed contact regions to induce non-homogeneous current directions and densities, reducing shape anisotropy and enhancing specific resistance, thereby minimizing angle errors and power consumption.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If wider AMR stripes are used to reduce shape anisotropy, then magnetic anisotropy effects are reduced, but chip size increases

Engineering Contradiction:
Improveangle sensor accuracyVSAvoidchip size
Core Design Contradiction:
Measurement precisionVSArea of stationary object

Solution Approach 1:

The patent changes the geometric parameters of the xMR structure by using non-elongated shapes with specific aspect ratios and strategic contact region placements. This modifies the current density distribution and magnetic field patterns, reducing shape anisotropy effects without requiring increased chip area, thereby resolving the contradiction between measurement precision and chip size

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent applies local quality by creating non-uniform current density distributions through strategically placed contact regions on the non-elongated structure. Different regions of the xMR structure experience different current densities, which optimizes the magnetic sensing performance locally while maintaining overall compact dimensions, thus improving angle accuracy without increasing chip size

Inventive Principle:
Principle #3Local quality

2Measurement precision

If wider strips are used to reduce anisotropy effects, then angle errors are reduced, but chip size and cost increase

Engineering Contradiction:
Improveangle errorVSAvoidmanufacturing cost
Core Design Contradiction:
Measurement precisionVSEase of manufacture

Solution Approach 1:

The patent modifies structural parameters by employing non-elongated xMR structures with optimized contact region geometries and positions. This changes the electromagnetic field distribution and reduces anisotropy effects, achieving lower angle errors without requiring wider strips that would increase manufacturing complexity and cost

Inventive Principle:
Principle #35Parameter changes

3Measurement precision

If non-elongated structures with non-homogeneous current distribution are used, then shape anisotropy is reduced and specific resistance increases, but structure complexity increases

Engineering Contradiction:
Improveangle sensor accuracyVSAvoidstructure complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent implements local quality through non-uniform contact region placements on the non-elongated structure, creating targeted current density variations in specific areas. This local optimization reduces shape anisotropy and enhances specific resistance without requiring complex overall structural designs, thereby improving accuracy while maintaining manufacturing simplicity

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly reduces angle errors and hysteresis effects while maintaining sensor accuracy and reducing power consumption, achieved through tailored contact designs and configurations that modify current distributions without increasing chip size.

Implementation Method 1

Magnetoresistive sensors can include anisotropic magnetoresistive (AMR), giant magnetoresistive (GMR), tunnel magnetoresistive (TMR) and other technologies, referred to collectively as xMR technologies

Methodology Applied
Scientific EffectMagnetoresistive effect: Magnetoresistance

Implementation Method 2

Key influencing factors are magnetic domains near the structure edge because the shape anisotropy caused by the demagnetizing field is strongest near the edge

Methodology Applied
Scientific EffectShape anisotropy: Anisotropy

Implementation Method 3

defects at the edge related to the etch process can act as pinning centers that potentially lead to domain generation responsible for hysteresis effects

Methodology Applied
Scientific EffectHysteresis: Hysteresis

Data Source

PatentUS9753101B2XMR angle sensors
Publication Date: 2017.09.05 INFINEON TECHNOLOGIES AG
  • US9753101B2 patent drawing
  • US9753101B2 patent drawing
  • US9753101B2 patent drawing

AI summary

Embodiments relate to xMR sensors, sensor elements and structures, and methods. In an embodiment, a sensor element comprises a non-elongated xMR structure; and a plurality of contact regions formed on the xMR structure spaced apart from one another such that a non-homogeneous current direction and current density distribution are induced in the xMR structure when a voltage is applied between the plurality of contact regions.