X-ray Analysis Device Dual-Detector Axis Alignment

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Solution Overview

Problem

Current X-ray analysis devices require frequent optical axis alignment and analyzer attachment/detachment for high-resolution measurements, leading to increased measurement time and cost, as well as reduced flexibility and efficiency.

Innovation Solution

An X-ray analysis device with a two-dimensional detector having distinct detection areas for direct and analyzer-reflecting optical paths, allowing for high-resolution measurements without repositioning the analyzer, and a method for optical axis alignment that fixes the relative position of the detector and analyzer, eliminating the need for frequent alignment.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the analyzer is placed on the optical path for high-resolution measurement, then measurement precision is improved, but optical axis alignment becomes harder and measurement time increases

Engineering Contradiction:
ImproveresolutionVSAvoidmeasurement time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The detector surface is divided into a first detection area for receiving direct diffracted X-rays and a second detection area for receiving analyzer-reflected X-rays. This segmentation allows simultaneous detection from both optical paths without requiring sequential alignment operations, thereby maintaining high resolution while reducing measurement time.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention transitions from sequential optical path selection (one dimension) to simultaneous dual-path detection using a two-dimensional detector with spatially separated detection areas. This dimensional change enables parallel measurement of both direct and analyzer-reflected X-rays, eliminating the time-consuming sequential alignment process.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Measurement precision

If the analyzer is attached and detached for high-resolution measurement, then measurement precision is improved, but device complexity and measurement cost increase

Engineering Contradiction:
ImproveresolutionVSAvoidattachment/detachment steps
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The invention merges the detection of direct X-rays and analyzer-reflected X-rays into a single detector assembly with two spatially separated detection areas. This integration eliminates the need for separate attachment and detachment operations, reducing device complexity while maintaining the capability for high-resolution measurement.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The detector is designed with multi-functionality, serving both as a direct detection device and an analyzer-based detection device through its two detection areas. This universal detector design eliminates the need for separate analyzer attachment/detachment mechanisms, simplifying the overall system while enabling high-resolution measurements.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Measurement precision

If optical axis alignment is performed at each measurement, then measurement precision is maintained, but productivity decreases

Engineering Contradiction:
Improvealignment accuracyVSAvoidmeasurement efficiency
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The detector is pre-configured with two spatially separated detection areas positioned to receive X-rays from two different optical paths. This preliminary geometric arrangement eliminates the need for real-time optical axis alignment during measurements, maintaining alignment accuracy while significantly improving measurement efficiency and productivity.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration reduces measurement time and cost by allowing seamless switching between high and low-resolution modes without repositioning the analyzer, maintaining measurement accuracy and flexibility.

Implementation Method 1

an analyzer using an analyzer crystal as an X-ray receiving optical component provided in an X-ray analysis device

Methodology Applied
Scientific EffectX-ray diffraction: Bragg Diffraction

Implementation Method 2

an N-dimensional detector... for detection

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Data Source

PatentEP3588068B1X-ray analysis device and method for optical axis alignment thereof
Publication Date: 2020.12.02 RIGAKU CORP
  • EP3588068B1 patent drawingFigure 1
  • EP3588068B1 patent drawingFigure 2
  • EP3588068B1 patent drawingFigure 3

AI summary

To provide an X-ray analysis device and a method for optical axis alignment thereof by which measurement time is shortened and measurement cost may be reduced without optical axis alignment at each measurement using an analyzer. The X-ray analysis device includes a sample stage for supporting a sample, an N-dimensional detector, and an analyzer including analyzer crystals. A detection surface of the N-dimensional detector has first and second detection areas, a plurality of optical paths includes a first optical path that directly reaches the first detection area and a second optical path that reaches via the analyzer crystals, and the N-dimensional detector performs a measurement of the first optical path by X-ray detection of the first detection area, and performs a measurement of the second optical path by X-ray detection of the second detection area.