X-ray Analysis Device with Energy Filter and Capillary Lens
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Solution Overview
Problem
Existing X-ray fluorescence (XRF) analysis technologies struggle to irradiate only a small, specific region of a sample without damaging surrounding components, as the irradiated area is often larger than desired, particularly in the semiconductor industry, leading to potential damage from X-rays.
Innovation Solution
A device comprising an X-ray tube, a capillary lens, and an energy-dependent filter is used to focus X-rays onto a micro-region of a sample, with the filter blocking X-rays of energy equal to or lower than a predetermined value, thereby controlling the dimensions of the irradiated area and eliminating diffraction peaks.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If an X-ray tube is used to irradiate a sample for XRF analysis, then element identification and concentration determination can be achieved, but the irradiated region becomes larger than desired, causing potential damage to surrounding electronics
Solution Approach 1:
The patent applies local quality by making the X-ray beam properties non-uniform across the sample surface.通过使用毛细透镜聚焦X射线和能量依赖滤波器选择特定能量范围，使得只有特定区域（微区）受到高强度X射线照射，而其他区域受到的照射强度大大降低，从而实现了局部精确分析而不损伤周围电子元件
Solution Approach 2:
The patent changes the energy parameter of X-rays by introducing an energy-dependent filter in the optical path. The filter blocks X-rays with energy equal to or lower than a predetermined value, thereby controlling the dimensions of the irradiated micro-region and eliminating diffraction peaks, which resolves the contradiction between analysis precision and irradiated area
2Area of stationary object
If the X-ray beam is focused to a micro-region, then the irradiated area is reduced, but the X-ray intensity may become insufficient for reliable analysis
Solution Approach 1:
The patent uses periodic action by employing a polycapillary lens with multiple capillaries that periodically repeat the focusing function. Each capillary acts as an independent focusing element, and their combined periodic structure maintains high X-ray intensity in the focused micro-region while keeping the irradiated area small, thus ensuring both sufficient intensity and analysis reliability
Solution Approach 2:
The patent applies composite materials by using a polycapillary lens made of multiple capillary tubes arranged in an array. This composite structure combines the focusing capability of individual capillaries with the intensity preservation of a larger aperture, enabling micro-region irradiation with sufficient X-ray intensity for reliable analysis
3Reliability
If an energy-dependent filter is placed in the optical path, then diffraction peaks are eliminated and micro-region dimensions are controlled, but the device complexity increases
Solution Approach 1:
The patent introduces an energy-dependent filter as an intermediary component in the optical path between the X-ray source and the sample. This filter mediates the X-ray beam by selectively blocking low-energy X-rays that cause diffraction peaks, thereby eliminating interference and improving analysis reliability. The filter is a simple passive component that adds minimal complexity to the system
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for precise X-ray analysis by minimizing the irradiated area to predetermined dimensions, enhancing analysis reliability and avoiding damage to surrounding electronics, while maintaining sufficient X-ray intensity and transmission characteristics.
Implementation Method 1
an X-ray tube and at least one capillary lens for focusing the X-rays in a micro-region at a location for a sample for analysis
Implementation Method 2
at least one energy-dependent filter placed in the optical path between the X-ray tube and the sample location, wherein the filter is adapted to block in considerable measure X-rays with an energy which is equal to or lower than a predetermined energy value
Implementation Method 3
an X-ray tube and at least one capillary lens for focusing the X-rays in a micro-region at a location for a sample for analysis
Implementation Method 4
X-ray fluorescence (XRF) spectrometry is generally applied for the purpose of identifying and determining concentrations of elements in specimens of materials
Implementation Method 5
a detector for detecting X-ray fluorescence from the sample
Data Source
AI summary
The invention relates to a device for performing X-ray analysis. Device 1 comprises an X-ray tube 2 and at least one capillary lens 4 for focusing the X-rays in a micro-region at a location 5 for a sample for analysis. Device 1 further comprises a detector 6 for detecting X-ray fluorescence from the sample. Device 1 further comprises at least one energy-dependent filter 3 placed between the X-ray tube 2 and the capillary lens 4. The filter 3 is adapted to substantially block X-rays with an energy which is lower than a predetermined threshold value.