X-ray Analysis Apparatus Height Measurement and Collision Avoidance

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Solution Overview

Problem

Existing X-ray analysis apparatuses require manual alignment of the focus position of the objective lens and primary X-ray, which is inefficient and risks collision with samples having significant concavity and convexity, and lacks automated height measurement for precise positioning.

Innovation Solution

An X-ray analysis apparatus with a laser displacement sensor using a triangulation-based system to accurately measure the height of the sample, allowing for automatic adjustment of the sample's position relative to the radiation source and X-ray detector, and a focus switching mechanism to align optical axes coaxially, enabling precise and efficient measurement.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If manual alignment of focus position is used, then the apparatus structure is simple, but the operation efficiency is low and collision risk increases

Engineering Contradiction:
Improveoperation efficiencyVSAvoidapparatus structure
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The system performs self-alignment by automatically measuring the sample surface height with a laser displacement sensor and adjusting the objective lens and X-ray generator positions accordingly, eliminating the need for manual alignment operations and significantly improving operational efficiency

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The patent replaces manual mechanical alignment operations with an automated optical measurement system (laser displacement sensor) and computer-controlled positioning mechanisms, substituting human-operated mechanical systems with automated optical-mechanical integration

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Adaptability or versatility

If revolver switching is used, then lens selection is flexible, but the operation becomes complex and time-consuming

Engineering Contradiction:
Improvelens switching capabilityVSAvoidoperation simplicity
Core Design Contradiction:
Adaptability or versatilityVSEase of operation

Solution Approach 1:

The system dynamically adjusts the objective lens position along the optical axis based on real-time sample surface height measurements, allowing continuous focus adjustment rather than discrete revolver switching, which simplifies operation while maintaining versatility

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The laser displacement sensor acts as an intermediary that provides real-time height information to the control system, enabling automatic positioning of the objective lens and X-ray generator without requiring manual revolver operation

Inventive Principle:
Principle #24Intermediary (Mediator)

3Reliability

If fixed focus position alignment is used, then the setup is simple, but collision risk with concave-convex samples increases

Engineering Contradiction:
Improvecollision avoidanceVSAvoidpositioning system
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The system performs preliminary measurement of the sample surface height using a laser displacement sensor before positioning the objective lens and X-ray generator, allowing advance detection of concave-convex features and prevention of collisions

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The control system uses feedback from the laser displacement sensor to continuously monitor sample surface height and automatically adjust the positions of the objective lens and X-ray generator, ensuring safe operation over concave-convex samples

Inventive Principle:
Principle #23Feedback

4Measurement precision

If automated height measurement is implemented, then positioning precision is improved, but the device complexity increases

Engineering Contradiction:
Improveheight measurement accuracyVSAvoidmeasurement system
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The laser displacement sensor serves as an intermediary measurement device that provides precise height information without requiring complex direct measurement mechanisms, achieving high positioning precision through optical measurement

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution allows for safe and efficient sample measurement by accurately determining the sample's height and adjusting its position, reducing the risk of collision and improving operational efficiency, while enabling accurate quantitative analysis.

Implementation Method 1

a laser displacement sensor using a triangulation-based system to accurately measure the height of the sample

Methodology Applied
Scientific EffectTriangulation: Parallax

Implementation Method 2

A fluorescence X-ray analysis is performed by irradiating a sample with an X-ray emitted from an X-ray source, detecting a fluorescence X-ray, which is a characteristic X-ray emitted from the sample

Methodology Applied
Scientific EffectFluorescence: Fluorescence

Data Source

PatentUS8408789B2X-ray analysis apparatus and X-ray analysis method
Publication Date: 2013.04.02 HITACHI HIGH TECH ANALYSIS CORP
  • US8408789B2 patent drawing
  • US8408789B2 patent drawing
  • US8408789B2 patent drawing

AI summary

An X-ray analysis apparatus including: a radiation source configured to irradiate an irradiation point on a sample with radiation; an X-ray detector configured to detect a characteristic X-ray emitted from the sample, and output a signal including energy information about the characteristic X-ray; an analyzer configured to analyze the signal; a sample stage configured to allow placement of the sample thereon; a shifting mechanism being capable of relatively shifting the sample on the sample stage and the radiation source and the X-ray detector with respect to each other; a height measuring mechanism being capable of measuring the height of the irradiation point on the sample; and a controller configured to control the shifting mechanism on the basis of the measured height of the irradiation point on the sample and adjust the distance of the sample with respect to the radiation source and the X-ray detector is used.