X-ray Analysis Apparatus High-Speed Phi-Axis Rotation
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Solution Overview
Problem
Current high-resolution X-ray analysis apparatuses with four adjustable axes are time-consuming for evaluating distortion in epitaxial films, making them unsuitable for high-speed inspection in manufacturing environments.
Innovation Solution
The X-ray analysis apparatus includes a second φ-axis rotating stage that rotates the specimen at a higher speed than the first φ-axis rotating stage, allowing for faster optimization of the 2θ and ω axes, reducing the number of axes that need to be scanned, and utilizing a high-speed motor for the second φ-axis rotation drive unit to decrease evaluation time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If four-axis adjustment is performed using pulse motors for positional control, then measurement precision is improved, but productivity deteriorates due to time-consuming adjustments
Solution Approach 1:
The single φ-axis rotation function is segmented into two independent rotation stages: a first φ-axis rotating stage for coarse positioning and a second φ-axis rotating stage for fine positioning. This segmentation allows parallel operation where the second stage rotates at high speed while the first stage performs slower positional adjustments, resolving the contradiction between measurement precision and productivity by enabling simultaneous coarse and fine adjustments without sequential scanning delays
Solution Approach 2:
The system implements dynamic rotation speed control where the second φ-axis rotating stage rotates at a higher speed than the first φ-axis rotating stage. This dynamic speed differentiation allows the fine-positioning stage to complete multiple rotation cycles during the coarse-positioning stage's single cycle, significantly reducing total adjustment time while maintaining the precision required for distortion evaluation
2Measurement precision
If scanning is repeatedly performed for each axis to optimize four axial angles, then measurement precision is improved, but loss of time increases
Solution Approach 1:
The second φ-axis rotating stage performs preliminary high-speed rotation to rapidly bring the specimen into the optimal angular range before the detection system completes the diffraction measurement. This preliminary action eliminates the need for repeated scanning cycles, as the high-speed rotation continuously samples different angular positions during a single measurement cycle, allowing diffraction peak optimization to be achieved in one pass rather than through multiple sequential scans
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables faster evaluation of distortion in epitaxial films by reducing the time required for axis adjustments and optimization, making high-resolution X-ray analysis more suitable for high-speed inspection applications.
Implementation Method 1
an X-ray source 110 that emits an X-ray
Implementation Method 2
the X-ray diffracted by the specimen 101
Implementation Method 3
a scintillation detector 122 that detects the X-ray
Data Source
AI summary
An X-ray analysis apparatus includes: an X-ray source that emits an X-ray irradiating a specimen; a specimen holding unit that holds the specimen; and an X-ray detecting unit that detects the X-ray diffracted by the specimen; wherein the specimen holding unit includes a second φ-axis rotating stage rotating the specimen about a φ-axis, a first φ-axis rotating stage rotating the entirety of the second φ-axis rotating stage about the φ-axis, the second φ-axis rotating stage being disposed on the first φ-axis rotating stage, a φ-axis rotating stage that rotates the entirety of the first φ-axis rotating stage about a φ-axis, an ω-axis rotating stage that rotates the entirety of the χ-axis rotating stage about an ω-axis, and a 2θ-axis rotating stage rotating the X-ray detecting unit about the 2θ-axis, wherein the second φ-axis rotating stage unit rotates at a speed higher than that of the first φ-axis rotating stage.