X-ray Analysis Apparatus Concave-Convex Shadow Detection
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Solution Overview
Problem
Conventional X-ray analysis apparatuses face difficulties in pinpoint analysis of samples with concave-convex portions, as convex features absorb X-rays, preventing analysis and making it challenging to identify areas that cannot be analyzed due to the sample's geometry.
Innovation Solution
The apparatus includes a concave-convex illumination mechanism that sets the optical axis of illumination light towards the irradiation point in the same direction as the X-ray detector, generating a shadow portion corresponding to concave-convex features, which can be specified as areas incapable of analysis through image processing, preventing erroneous measurements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a conventional optical microscope observes the sample from above in the same direction as the X-ray source, then the sample can be observed for identification, but it is difficult to specify areas incapable of being analyzed due to concave-convex portions
Solution Approach 1:
The patent introduces a new observation dimension by placing the optical microscope adjacent to the X-ray detector, allowing observation from the detection direction rather than from above. This dimensional change enables the optical microscope to capture shadow portions that correspond to areas where X-rays are blocked by convex portions, providing visual information about unanalyzable regions that cannot be obtained from conventional top-down observation
Solution Approach 2:
The patent uses shadow portions created by oblique illumination as an intermediary indicator to represent areas incapable of X-ray analysis. By illuminating the sample from the detection direction and capturing the resulting shadows with the optical microscope, the system creates a visual map that indirectly indicates which areas will have insufficient X-ray signals, allowing operators to identify unanalyzable regions without direct X-ray measurement
2Reliability
If a convex portion of the sample exists between the X-ray detector and the irradiation point, then the sample structure is preserved, but the generated X-ray is absorbed and does not reach the detector, making analysis impossible
Solution Approach 1:
The patent performs preliminary observation using the optical microscope positioned adjacent to the detector before conducting X-ray analysis. This allows the system to identify shadow portions and potential unanalyzable areas in advance, enabling operators to select appropriate analysis points or adjust measurement parameters before actual X-ray measurement, thereby avoiding wasted measurements on areas that would yield insufficient signals
Solution Approach 2:
The patent creates a feedback loop by using the optical microscope to continuously monitor the sample surface and identify shadow portions that indicate potential analysis problems. This visual feedback allows operators to adjust the irradiation point selection or sample positioning in real-time, ensuring that X-ray analysis is performed only on areas where sufficient signals can be obtained, thus maintaining measurement precision while preserving sample integrity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for easy identification and specification of areas that cannot be analyzed, enhancing the reliability of X-ray analysis results and preventing unnecessary analysis by providing a visible shadow image, thus ensuring accurate data collection.
Implementation Method 1
the illumination mechanism includes a concave-convex illumination section in which an optical axis of the illumination light at a time of the illuminating is set toward the irradiation point in the same direction as a direction linking the irradiation point with the X-ray detector at a time of the detecting
Implementation Method 2
an X-ray detector for detecting a characteristic X-ray and a scattered X-ray radiated from the sample and outputting a signal containing energy information on the characteristic X-ray and the scattered X-ray
Data Source
AI summary
Provided are an X-ray analysis apparatus and an X-ray analysis method, in which a measurer can judge an area incapable of being analyzed in a sample with a concave-convex portion. The X-ray analysis apparatus includes: an X-ray tubular bulb for irradiating an arbitrary irradiation point located on the sample with a radiation beam; an X-ray detector for detecting a characteristic X-ray and a scattered X-ray radiated from the sample and outputting a signal containing energy information on the characteristic X-ray and the scattered X-ray; a narrow-range illumination mechanism and a wide-range illumination mechanism for emitting an illumination light to the sample to illuminate the sample; and a narrow-range observation mechanism and a wide-range observation mechanism for obtaining an illumination image of the sample, which is illuminated with the illumination light, as image data, in which the narrow-range observation mechanism and the wide-range observation mechanism include a narrow-range oblique illumination section and a wide-range oblique illumination section, respectively, in which an optical axis of the illumination light at a time of the illuminating is set toward the irradiation point in the same direction as a direction linking the irradiation point with the X-ray detector at a time of the detecting.