X-ray Analyzer Real-Time Element Distribution Imaging

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Solution Overview

Problem

Conventional X-ray analyzers face challenges in quick positioning and observing temporal changes due to the generation of element distribution images as still images, requiring labor and time, and inability to determine the correct range from non-element distribution images, making it difficult to position accurately and observe moving elements or temporal changes.

Innovation Solution

An X-ray analyzer with an electron gun, electron lens system, and a controller that enables scanning and generates element distribution images in real-time, allowing for quick positioning and observation of temporal changes by associating time information with image data, enabling dynamic display and adjustment of scanning positions and sample conditions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If element distribution images are generated as still images using conventional X-ray analyzers, then the image quality and contrast are maintained, but the positioning speed is slow and temporal changes cannot be observed

Engineering Contradiction:
Improvepositioning speedVSAvoidtime for image generation and positioning
Core Design Contradiction:
SpeedVSLoss of time

Solution Approach 1:

The patent transforms the static still image generation process into a dynamic real-time imaging process. The electron beam continuously scans the sample while the controller generates element distribution images at multiple time points, enabling dynamic observation of temporal changes and rapid positioning through real-time feedback of element distributions.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent implements continuous scanning of the sample by the electron beam, with uninterrupted generation of element distribution images throughout the scanning process. This continuous action eliminates the need to stop for separate positioning steps, allowing operators to quickly locate regions of interest by observing real-time element distribution changes.

Inventive Principle:
Principle #20Continuity of useful action

2Measurement precision

If multiple still images are generated and checked repeatedly to achieve desired positioning, then accurate element distribution images are obtained, but labor and time are excessively consumed

Engineering Contradiction:
Improvepositioning accuracyVSAvoidoperation efficiency
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The patent implements real-time feedback by continuously displaying element distribution images during the scanning process. Operators can immediately observe the current element distribution state and adjust the scanning range or focus accordingly, eliminating the need for repeated trial-and-error positioning that characterizes conventional still image generation methods.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent performs preliminary positioning by displaying element distribution images in real-time during the scanning process, allowing operators to identify regions of interest before completing the full high-resolution scan. This preliminary observation guides subsequent focused scanning, reducing the need for multiple complete scans and improving overall positioning efficiency.

Inventive Principle:
Principle #10Preliminary action

3Loss of information

If non-element distribution images such as electron microscopic images are used for positioning, then initial sample overview is obtained, but the correct range for element distribution imaging cannot always be determined

Engineering Contradiction:
Improveinformation content difference between image typesVSAvoidpositioning ease
Core Design Contradiction:
Loss of informationVSEase of operation

Solution Approach 1:

The patent makes the element distribution image generation process itself serve the dual function of both imaging and positioning. By displaying element distribution images in real-time during scanning, the system eliminates the need to rely on separate electron microscopic or optical microscopic images for positioning, as the element distribution information directly guides the positioning process.

Inventive Principle:
Principle #6Universality (Multi-functionality)

4Adaptability or versatility

If conventional X-ray analyzers generate still images, then device complexity is reduced, but the ability to observe temporal changes and moving samples is lost

Engineering Contradiction:
Improvecapability to observe temporal changesVSAvoidsystem complexity for real-time imaging
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent transforms the static imaging system into a dynamic real-time imaging system by implementing continuous electron beam scanning and sequential image generation. The controller coordinates the beam scanning and image capture to produce a series of element distribution images that reveal temporal changes, enabling observation of moving samples and dynamic processes without requiring fundamentally different hardware.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution allows for rapid and accurate positioning of element distribution image ranges and real-time observation of temporal changes, improving the speed and quality of element distribution image generation while maintaining equivalent contrast and quality to conventional analyzers.

Implementation Method 1

an electron beam or an X-ray is applied to a sample, a characteristic X-ray or an X-ray fluorescence generated on the sample

Methodology Applied
Scientific EffectElectron impact excitation: Electron Impact Desorption

Implementation Method 2

an electron beam source, a scanning unit comprising a beam deflecting unit and a sample stage

Methodology Applied
Scientific EffectElectromagnetic focusing: Electromagnetic Induction

Data Source

PatentEP2790015B1X-ray analysis device
Publication Date: 2018.03.28 HORIBA LTD
  • EP2790015B1 patent drawingFigure 1
  • EP2790015B1 patent drawingFigure 2
  • EP2790015B1 patent drawingFigure 3

AI summary

An X-ray analyzer is provided that enables quick positioning and enables the observation of temporal changes by repeating the generation of an element distribution image. The X-ray analyzer repeats scanning of a sample S by an electron beam from an electron gun (beam source) (11), detects a characteristic X-ray from the sample S by an X-ray detector (13), generates an element distribution image of the sample S by a signal processor (21) every scanning, and stores a plurality of element distribution images in a sequential order. Temporal changes of the element distribution image of the sample S are obtained. Moreover, by moving a stage (14) by a moving unit (22) concurrently with the scanning, an element distribution image of the sample S where the scanning position is varied is obtained. By generating the element distribution image while varying the scanning position, positioning of the range where the element distribution image is to be obtained on the sample S can be quickly performed based on the element distribution image itself.