X-ray Analyzer Foreign Matter Positioning
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Solution Overview
Problem
Current X-ray analysis methods require cumbersome and time-consuming processes to accurately identify foreign matter elements, as they necessitate separate transmission and fluorescent X-ray analyses with potential positional misalignment, leading to low accuracy and inefficiency, especially when only specific parts of the sample need element analysis.
Innovation Solution
An integrated X-ray analyzer with a transmission X-ray inspecting portion, a fluorescent X-ray inspecting portion, a sample stage with a movement mechanism, and foreign matter position calculating means, allowing for precise alignment and automatic analysis of foreign matter elements using fluorescent X-rays at positions detected by transmission X-rays.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If separate transmission X-ray apparatus and fluorescent X-ray apparatus are used for foreign matter detection and element analysis, then element identification capability is improved, but analysis time and operational complexity increase significantly
Solution Approach 1:
The patent combines the transmission X-ray apparatus and fluorescent X-ray apparatus into a single integrated system. The transmission X-ray source and detector are positioned to detect foreign matter, while the fluorescent X-ray source and detector are integrated into the same apparatus. This merging allows both foreign matter detection and element analysis to be performed on the same sample without physical relocation, thereby reducing analysis time while maintaining element identification capability.
Solution Approach 2:
The system performs transmission X-ray inspection first to detect and locate foreign matter, then automatically positions the fluorescent X-ray source and detector to analyze the detected foreign matter. This preliminary detection and automatic positioning eliminates the need for manual marking and relocation, significantly reducing the time required for element analysis while ensuring accurate targeting of foreign matter.
2Adaptability or versatility
If manual marking and relocation of sample between separate apparatus is performed, then element analysis capability is improved, but measurement precision decreases due to positional misalignment
Solution Approach 1:
By integrating both transmission and fluorescent X-ray inspection functions into a single apparatus with a shared sample stage, the system eliminates the need to physically relocate the sample between separate devices. The sample remains stationary on the same stage, and the system switches between inspection modes, thereby maintaining precise positional alignment and eliminating measurement errors associated with manual relocation.
Solution Approach 2:
The system uses the transmission X-ray detector to detect foreign matter and automatically calculates its position. This positional information is fed back to the control system, which then automatically positions the fluorescent X-ray source and detector to target the exact location of the detected foreign matter. This feedback mechanism ensures high measurement precision by eliminating manual positioning errors.
3Measurement precision
If entire sample surface is subjected to fluorescent X-ray analysis, then comprehensive element detection is improved, but analysis time increases unnecessarily
Solution Approach 1:
The system performs transmission X-ray inspection to identify specific regions containing foreign matter, then directs fluorescent X-ray analysis only to those localized regions. This selective approach applies different inspection qualities to different parts of the sample: comprehensive transmission inspection for foreign matter detection, followed by targeted fluorescent analysis only where needed. This significantly improves analysis efficiency by avoiding unnecessary full-surface fluorescent scanning while maintaining comprehensive element detection capability for actual foreign matter.
Solution Approach 2:
Instead of performing complete fluorescent X-ray analysis on the entire sample surface, the system performs partial analysis only on regions where foreign matter is detected through transmission X-ray inspection. This partial action approach applies the more time-consuming fluorescent analysis technique only where necessary, thereby maintaining element detection comprehensiveness while dramatically improving overall analysis efficiency by avoiding redundant scanning of foreign matter-free regions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate and rapid element analysis of foreign matter using fluorescent X-rays, reducing analysis time and improving precision by ensuring exact alignment and maintaining optimal measurement distances, thus enhancing the efficiency of the analysis process.
Implementation Method 1
a transmission X-ray detector for detecting a transmission X-ray having passed through a sample from the first X-ray source
Implementation Method 2
a fluorescent X-ray detector for detecting a fluorescent X-ray output from the sample when the sample is irradiated with an X-ray from the second X-ray source
Data Source
AI summary
An X-ray analyzer includes a transmission X-ray inspecting portion having a first X-ray source and a transmission X-ray detector for detecting a transmission X-ray that passed through a sample from the first X-ray source, and a fluorescent X-ray inspecting portion having a second X-ray source and a fluorescent X-ray detector for detecting a fluorescent X-ray output from the sample when the sample is irradiated with an X-ray from the second X-ray source. A movement mechanism moves a sample stage that supports the sample. A foreign matter position calculating unit calculates a position of foreign matter in the sample, and a movement mechanism control unit controls the movement mechanism so that the position of the foreign matter calculated by the foreign matter position calculating unit coincides with an optical axis of the second X-ray source.