X-ray Analyzer Gate Valve with X-ray Window

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Solution Overview

Problem

Existing X-ray analyzers face challenges in achieving versatility and efficient X-ray acquisition across different vacuum states, with current technologies struggling to maintain high-vacuum conditions while allowing for low-vacuum analysis and efficiently detecting characteristic X-rays without significant attenuation.

Innovation Solution

The X-ray analyzer incorporates a gate valve with a partition plate that allows for communication between the sample chamber and the room-temperature shield, featuring an X-ray transmission portion to enable X-ray detection in both high and low vacuum states, along with a deformable room-temperature shield for adjustable positioning and a capillary for efficient X-ray propagation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the gate valve is closed to maintain high vacuum in the room-temperature shield, then vacuum stability is improved, but X-ray acquisition efficiency deteriorates due to attenuation through the partition plate

Engineering Contradiction:
Improvevacuum stabilityVSAvoidX-ray acquisition efficiency
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The patent extracts the vacuum maintenance function from the partition plate by making it transparent to X-rays while maintaining vacuum separation. The partition plate is designed with X-ray transmission capability, allowing X-rays to pass through while the gate valve maintains vacuum separation between chambers.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The partition plate acts as an intermediary that mediates between vacuum separation and X-ray transmission. It allows X-rays to pass through while maintaining the vacuum barrier, serving as a mediator that reconciles the conflicting requirements of vacuum stability and X-ray acquisition efficiency.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Productivity

If the gate valve is opened to improve X-ray acquisition efficiency, then X-ray transmission is improved, but vacuum control versatility deteriorates

Engineering Contradiction:
ImproveX-ray acquisition efficiencyVSAvoidvacuum control versatility
Core Design Contradiction:
ProductivityVSAdaptability or versatility

Solution Approach 1:

The gate valve provides dynamic control, allowing the system to switch between open and closed states depending on the analysis requirements. This dynamic capability enables the system to adapt between high vacuum and low vacuum modes, maintaining versatility while improving X-ray acquisition when needed.

Inventive Principle:
Principle #15Dynamics

3Productivity

If an X-ray window is mounted on the heat shield, then X-ray transmission is improved, but heat shielding effectiveness deteriorates

Engineering Contradiction:
ImproveX-ray transmissionVSAvoidheat shielding effectiveness
Core Design Contradiction:
ProductivityVSTemperature

Solution Approach 1:

The X-ray window is implemented as a thin film structure that allows X-ray transmission while maintaining heat shielding. The thin film design permits X-rays to pass through while still providing thermal barrier functionality.

Inventive Principle:
Principle #30Flexible shells and thin films

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances versatility by allowing analysis in both high and low vacuum states, reduces X-ray attenuation, and improves acquisition efficiency, particularly for characteristic X-rays of 1 keV or lower, while maintaining convenient operation and effective heat shielding.

Implementation Method 1

the partition plate has an X-ray transmission portion allowing the characteristic X-ray emitted from the sample to pass therethrough

Methodology Applied
Scientific EffectX-ray transmission: Absorption (EM radiation)

Implementation Method 2

at least a portion of the room-temperature shield is formed by a bellows

Methodology Applied
Scientific EffectElastic deformation: Elasticity

Implementation Method 3

a capillary for efficient X-ray propagation

Methodology Applied
Scientific EffectX-ray propagation:

Implementation Method 4

the gate valve is openable and closable, and at least a portion of the room-temperature shield is formed by a bellows

Methodology Applied
Scientific EffectVacuum sealing: Vacuum

Data Source

PatentEP3220135B1X-ray analyzer
Publication Date: 2019.08.28 HITACHI HIGH TECH SCIENCE CORP
  • EP3220135B1 patent drawingFigure 1
  • EP3220135B1 patent drawingFigure 2
  • EP3220135B1 patent drawingFigure 3

AI summary

An X-ray analyzer includes an X-ray excitation device, an X-ray detection device, and a gate valve. The X-ray excitation device includes a sample chamber in which a sample as an analysis target can be disposed. The X-ray detection device includes a TES which can detect a characteristic X-ray emitted from the sample, and a room-temperature shield which surrounds the TES. The gate valve is disposed between the X-ray excitation device and the X-ray detection device. The inside of the room-temperature shield is provided to enable communication with the inside of the sample chamber. The gate valve includes a partition plate provided to enable blocking of a communication between the inside of the sample chamber and the inside of the room-temperature shield. The partition plate has a pressure-resistant X-ray window.