X-Ray Transmission Inspection with Dynamic Angle Parallax Depth Sensing
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Solution Overview
Problem
Conventional X-ray transmission inspection devices have low precision in estimating the depth position of foreign objects due to small differences in X-ray irradiation angles and sample movement, resulting in inadequate depth estimation.
Innovation Solution
An X-ray transmission inspection apparatus with a moving mechanism that changes X-ray irradiation angles by moving the X-ray source, sensor, and sample relative to each other, allowing for large differences in irradiation angles during sample movement in orthogonal directions, enabling high-precision depth estimation of foreign objects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a plurality of X-ray sensors is used with a small distance between them, then the device complexity is reduced, but the measurement precision of foreign object depth position deteriorates
Solution Approach 1:
The patent employs a moving mechanism that dynamically changes the irradiation angle of the X-ray source relative to the sample during transport. This dynamic adjustment of the irradiation angle in conjunction with sample transport creates sufficient misalignment between transmission images, resolving the depth estimation precision problem without requiring multiple fixed sensors
Solution Approach 2:
The patent introduces the irradiation angle as an additional dimension of variation. By changing the irradiation angle while transporting the sample, the system creates misalignment in a different dimensional space, which enables depth estimation without increasing the number of sensors or their spacing
2Measurement precision
If the distance between X-ray sensors is increased, then the measurement precision of foreign object depth position is improved, but the device complexity and space requirements increase
Solution Approach 1:
Instead of using multiple fixed sensors at large distances, the patent uses a single sensor system with dynamic irradiation angle changes. The moving mechanism adjusts the irradiation angle during sample transport, creating the necessary image misalignment dynamically rather than requiring static spatial separation
Solution Approach 2:
The sample transport mechanism itself serves dual purposes: it moves the sample through the inspection system and simultaneously creates the necessary misalignment between transmission images by coordinating with the irradiation angle changes, eliminating the need for separate misalignment generation devices
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus achieves high precision in estimating the depth position of foreign objects by increasing the misalignment amount between transmission images obtained at different irradiation angles, improving the accuracy of depth estimation.
Implementation Method 1
X-ray transmission inspection performed by an X-ray transmission image obtained by irradiating a sample with X-rays to detect a metal foreign object in the sample
Implementation Method 2
the amount of misalignment of a foreign object in a sample between transmission images decreases, so there is a problem that the estimation precision of the depth of the position of the foreign object is low
Data Source
AI summary
Proposed are an X-ray transmission inspection apparatus and an X-ray transmission inspection method, in which transmission images with large difference between irradiation angles are obtained so that the depth of the position of a foreign object can be obtained with high precision. The X-ray transmission inspection apparatus includes an X-ray source, an X-ray sensor configured to detect a transmitted X-ray, a moving mechanism configured to move the sample, and a calculation part configured to calculate a height position of a foreign object in a thickness direction in the sample, wherein the X-ray source performs irradiation with X-rays in a direction tilted with respect to the thickness direction of the sample and a transport direction of the sample, and the moving mechanism is capable of moving the sample in a first transport direction and in a second transport direction, and of changing X-ray irradiation angles.