Multi-Angle X-Ray Inspection for Precise Foreign Object Depth
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Solution Overview
Problem
Conventional X-ray transmission inspection methods using multiple X-ray sensors with small distances and angles result in low precision for estimating the depth of foreign objects due to reduced misalignment in transmission images.
Innovation Solution
The apparatus employs multiple X-ray sources paired with sensors, irradiating at different angles and detecting transmitted X-rays, allowing for large differences in irradiation angles to increase the misalignment of foreign objects in transmission images, enabling precise depth estimation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple X-ray sensors are used with small distances between them, then the device complexity is reduced, but the measurement precision of foreign object depth is insufficient
Solution Approach 1:
The patent transitions from a single-plane sensor arrangement to a multi-dimensional configuration where sensors are distributed across different heights and lateral positions. This spatial dimensionality change enables the system to capture X-ray transmission images from multiple angles simultaneously, increasing the misalignment amount of foreign objects and thereby improving depth estimation precision without simply increasing the number of sensors in one direction.
Solution Approach 2:
The sensor system is segmented into multiple independent sensor units, each positioned at different locations and heights. This segmentation allows each sensor to capture X-ray images from its specific viewpoint, and the combined data from these segmented sensors provides comprehensive depth information through image misalignment analysis.
2Productivity
If X-ray sensors are positioned to detect transmitted X-rays from multiple sources, then the productivity of inspection is improved, but the loss of information due to overlapping X-ray paths increases
Solution Approach 1:
The patent introduces a calculation unit as an intermediary that processes the transmitted X-ray images from multiple sensors. This calculation unit analyzes the misalignment amounts of foreign objects across different images and computes depth information, effectively mediating between the raw X-ray data and the final inspection results. This intermediary processing resolves the information loss by systematically reconstructing depth data from multi-angle images.
3Measurement precision
If the distance between X-ray sources and sensors is increased, then the measurement precision of foreign object position is improved, but the use of energy by the X-ray system increases
Solution Approach 1:
The X-ray system is designed with multi-functionality where a single X-ray source can serve multiple sensors positioned at different locations. This universal design allows the system to achieve enhanced position detection precision through multi-angle imaging without proportionally increasing energy consumption, as the same X-ray source fulfills multiple detection functions simultaneously.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the precision of depth estimation for foreign objects by increasing the misalignment in transmission images, providing accurate height positioning of foreign objects within samples.
Implementation Method 1
X-ray transmission inspection performed by an X-ray transmission image obtained by irradiating a sample with X-rays to detect a metal foreign object in the sample
Implementation Method 2
the amount of misalignment of a foreign object in a sample between transmission images is used so that a distance between an X-ray source and the inspection object of the sample, that is, depth information can be obtained
Data Source
AI summary
Proposed are an X-ray transmission inspection apparatus and an X-ray transmission inspection method, in which transmission images with a large difference between irradiation angles are obtained so that the depth of the position of a foreign object can be obtained with high precision. The apparatus includes an X-ray source, an X-ray sensor configured to detect a transmitted X-ray, a sample moving mechanism configured to move the sample in a specific transport direction, and a calculation part configured to calculate a height position of a foreign object in a thickness direction in the sample on the basis of the transmitted X-ray detected by the X-ray sensor, wherein the X-ray source and the X-ray sensor include X-ray sources and X-ray sensors, the X-ray sources irradiate the sample with x-rays, and the X-ray sensors are disposed to respectively detect only transmitted X-rays of X-rays from the corresponding X-ray sources.