X-ray Destaticizer for Developing Solution Film Uniformity
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Solution Overview
Problem
Developing treatment processes using high-volume resistivity solutions like butyl acetate often result in defects near the center of substrates due to electrostatic charging and dielectric breakdown, leading to the 'center mode' issue where developing solution forms spherical particles that remain on the substrate during drying.
Innovation Solution
Incorporating a destaticizer that supplies ions ionized by X-rays to the developing solution to prevent electrostatic charging, ensuring the solution remains in a film form and is effectively spun off during drying, thereby preventing defects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a high-volume resistivity developing solution like butyl acetate is used, then the developing treatment can be performed effectively, but electrostatic charging occurs leading to dielectric breakdown and formation of spherical particles that cause defects near the substrate center
Solution Approach 1:
An insulating member (intermediary component) is introduced into the solution supply path to control and manage the electrostatic charging of the developing solution. This intermediary element provides a controlled interface for charge dissipation, preventing uncontrolled dielectric breakdown while maintaining the high-volume resistivity properties needed for effective developing treatment.
Solution Approach 2:
The patent replaces purely mechanical/physical friction-based charging (triboelectric effect between solution and pipe) with a controlled electrical field management system. By introducing the insulating member with specific electrical properties, the system transitions from uncontrolled electrostatic accumulation to managed charge dissipation, preventing dielectric breakdown.
2Device complexity
If the developing solution is discharged without destaticization, then the process is simple, but the solution forms spherical particles due to electrostatic repulsion that remain on the substrate during drying causing defects
Solution Approach 1:
The destaticizer is positioned to ionize the developing solution immediately before discharge onto the substrate. This preliminary destaticization action ensures that the solution arrives at the substrate with reduced electrostatic charge, preventing the formation of spherical particles during the drying process and eliminating defects near the substrate center.
Solution Approach 2:
The patent replaces the simple mechanical discharge process with an enhanced process that incorporates X-ray ionization. This substitution introduces a physical field (X-ray) to modify the electrical properties of the solution, transforming it from a charged state that causes defects to a destaticized state that ensures uniform film formation and defect-free substrates.
3Device complexity
If no destaticizer is used, then the device complexity is low, but defects occur near the center of the substrate due to electrostatic repulsion preventing uniform solution removal
Solution Approach 1:
The destaticizer acts as an intermediary device between the solution supply system and the substrate. It introduces ionized particles that neutralize the electrostatic charge in the developing solution, serving as a bridge that connects the charged solution to the substrate without allowing harmful electrostatic effects to manifest, thereby preventing central defects.
Solution Approach 2:
The patent changes the electrical parameter (electrostatic charge) of the developing solution by introducing a destaticizer. This parameter change transforms the solution from a high-charge state that causes spherical particle formation and defects to a low-charge state that enables uniform film formation and complete removal during drying, significantly improving manufacturing precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The use of an X-ray destaticizer significantly reduces defects near the substrate center by eliminating electrostatic repulsion, ensuring the developing solution is uniformly removed, thus preventing the 'center mode' and improving overall substrate quality.
Implementation Method 1
a destaticizer configured to supply ions ionized by an X-ray to the predetermined solution discharged to the treatment object substrate held on the rotating and holding part, to destaticize the predetermined solution
Data Source
AI summary
A developing treatment apparatus for performing a developing treatment on a treatment object substrate. The developing treatment apparatus includes: a rotating and holding part that holds and rotates the treatment object substrate; a discharger that discharges a predetermined solution relating to the developing treatment to the treatment object substrate held on the rotating and holding part; and a destaticizer that supplies ions ionized by an X-ray to the predetermined solution discharged to the treatment object substrate held on the rotating and holding part, to destaticize the predetermined solution.