X-ray Detection Apparatus Aberration Suppression via Selective Masking

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Solution Overview

Problem

X-ray detection apparatuses face challenges in reducing aberration caused by the mirror unit, especially when a single mirror unit is shared among multiple diffraction gratings with different characteristics, leading to suboptimal light collection and increased aberration issues.

Innovation Solution

Incorporating a mask member between the observation point and the mirror unit to selectively cover portions of the reflective surface that cause aberration, allowing for tailored light collection and aberration suppression based on the diffraction grating in use, thereby enhancing sensitivity and reducing aberration.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a single mirror unit is shared by multiple diffraction gratings, then cost and space are reduced, but aberration suppression becomes very difficult for all diffraction gratings

Engineering Contradiction:
Improvemirror unit configurationVSAvoidaberration suppression
Core Design Contradiction:
Device complexityVSManufacturing precision

Solution Approach 1:

The reflective surface of the mirror unit is segmented into multiple regions, each corresponding to a specific diffraction grating. A mask member is introduced to selectively mask specific regions of the reflective surface depending on which diffraction grating is being used, thereby suppressing aberrations for each grating individually while sharing a common mirror unit

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A mask member is introduced as an intermediary element between the mirror unit and the diffraction gratings. This mask member selectively blocks specific regions of the reflective surface to suppress aberrations caused by light reflected from unwanted regions, enabling precise control over which parts of the mirror contribute to the optical path for each grating

Inventive Principle:
Principle #24Intermediary (Mediator)

2Measurement precision

If the mirror unit uses an ideal shape to prevent aberration, then measurement precision is improved, but cost increases

Engineering Contradiction:
Improveaberration preventionVSAvoidcost
Core Design Contradiction:
Measurement precisionVSEase of manufacture

Solution Approach 1:

Instead of manufacturing an expensive ideal-shaped mirror unit, the patent extracts and masks only the specific regions of the reflective surface that cause aberrations. This allows the use of a simpler, cheaper mirror unit shape while still achieving aberration suppression by selectively blocking problematic regions with a mask member

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The mask member serves as a cost-effective solution compared to manufacturing an ideal-shaped mirror. The mask can be a simple opaque structure that selectively blocks aberration-causing regions, providing a low-cost alternative to precision-machined mirror surfaces

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

3Measurement precision

If the mirror unit collects more light, then sensitivity is improved, but aberration occurrence increases

Engineering Contradiction:
Improvelight collection sensitivityVSAvoidaberration
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

Different regions of the mirror unit's reflective surface are treated differently through selective masking. Regions that provide good light collection are left open, while regions that cause aberrations are masked. This local differentiation allows the system to collect sufficient light while suppressing aberrations from specific problematic areas

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution effectively reduces aberration and improves light collection sensitivity by selectively masking aberration-causing areas of the mirror unit, allowing for appropriate light collection for each diffraction grating, even when a single mirror unit is shared across multiple gratings.

Implementation Method 1

a mirror unit having a reflective surface which applies light collection on an X-ray from an observation point on a sample

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 2

a spectroscopic device that applies spectral dispersion on an X-ray from the mirror unit, to thereby generate a dispersed X-ray which is spatially spread

Methodology Applied
Scientific EffectSpectral dispersion: Diffraction

Implementation Method 3

a mask member that is provided between the observation point and the mirror unit, and that partially covers the reflective surface, to thereby limit a reflective X-ray which is reflected by the reflective surface and reaches the spectroscopic device

Methodology Applied
Scientific EffectAbsorption/Blocking: Absorption (EM radiation)

Data Source

PatentUS11699567B2X-ray detection apparatus and method
Publication Date: 2023.07.11 JEOL LTD
  • US11699567B2 patent drawing
  • US11699567B2 patent drawing
  • US11699567B2 patent drawing

AI summary

A mask member is provided at an entrance opening of a mirror unit. Of a first diffraction grating and a second diffraction grating, when the second diffraction grating is used, the mask member masks preceding mirrors. With this process, aberration caused by reflective X-ray is suppressed. When the first diffraction grating is used, the mask member does not function. Alternatively, the mask member and another mask member may be selectively used.