X-ray Detector Ground Line Breakage Prevention
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Solution Overview
Problem
X-ray detecting devices experience ground line breakage due to steps in the fabrication process, which affects the reliability and performance of the thin film transistor substrate.
Innovation Solution
The solution involves forming a storage electrode that extends along the ground line and connects to each X-ray detecting cell, reducing the likelihood of breakage by eliminating the step between the storage electrode and the ground line, and incorporating an auxiliary transparent data line to prevent data line breakage and reduce resistance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a ground line is formed in the conventional fabrication process, then the ground line provides electrical connection, but the ground line breaks due to steps formed during fabrication
Solution Approach 1:
The ground line is formed before the storage electrode is deposited. By performing the ground line formation in advance, the subsequent storage electrode deposition does not create steps that would break the ground line, thus preventing the reliability issue while maintaining manufacturing precision
Solution Approach 2:
The fabrication process is segmented into distinct stages: first forming the ground line, then depositing the storage electrode. This segmentation allows each layer to be formed independently without creating harmful steps, resolving the contradiction between reliability and manufacturing precision
2Reliability
If data lines are formed without auxiliary transparent lines, then the fabrication process is simpler, but data line breakage occurs and resistance increases
Solution Approach 1:
The data line is constructed as a composite structure with a metal layer providing electrical connection and a transparent conductive oxide layer providing mechanical support and additional conduction path. This composite structure prevents breakage and reduces resistance while adding necessary complexity to achieve the reliability improvement
Solution Approach 2:
The transparent conductive oxide layer serves multiple functions: it acts as an auxiliary conduction path to reduce resistance, provides mechanical support to prevent breakage, and maintains transparency for X-ray detection. This multi-functionality justifies the increased device complexity by delivering multiple benefits simultaneously
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively reduces ground line breakage and enhances the stability and performance of the X-ray detecting device by ensuring continuous electrical contact and minimizing signal loss.
Implementation Method 1
the photosensitive layer 6 produces electron-hole pairs in response to incident X-rays
Implementation Method 2
The electron-hole pairs are separated by a high voltage (several kVs) applied to the upper electrode 8
Data Source
AI summary
An X-ray detecting device, and a fabricating method thereof, that reduces ground line breakage. In the device and method, a storage electrode is formed along a ground line. Accordingly, a step between the storage electrode and the ground line is prevented, which reduces ground line breakage.