Semiconductor X-Ray Detector Layout for Heat and Resolution

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Solution Overview

Problem

Current semiconductor X-ray detectors face challenges in large-area and high-pixel production due to cumbersome heat management, which affects their efficiency and spatial resolution.

Innovation Solution

The design involves semiconductor radiation detectors with a continuous radiation absorption layer on one strip of a semiconductor wafer and an electronics layer on another strip, bonded longitudinally, with vias and redistribution layers for electrical connections, allowing for efficient detection and processing of X-ray signals without a scintillator, enabling improved heat management and spatial resolution.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If semiconductor X-ray detectors use direct conversion of X-ray into electric signals, then spatial resolution is improved, but heat management becomes cumbersome

Engineering Contradiction:
Improvespatial resolutionVSAvoidheat management
Core Design Contradiction:
Measurement precisionVSTemperature

Solution Approach 1:

The detector is divided into multiple independent pixel elements arranged in an array, with each pixel handling a small portion of the X-ray flux. This segmentation distributes the heat generation across many small units rather than concentrating it, making thermal management more manageable while maintaining high spatial resolution through the pixelated structure

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A specialized readout integrated circuit (ROIC) is introduced as an intermediary component that interfaces with the pixel array. The ROIC handles signal processing and heat dissipation, acting as a mediator between the X-ray detection function and thermal management requirements, allowing the detector to achieve both high resolution and acceptable heat management

Inventive Principle:
Principle #24Intermediary (Mediator)

2Area of stationary object

If the detector area is increased for large-area applications, then detection coverage is improved, but heat management difficulty increases

Engineering Contradiction:
Improvedetector areaVSAvoidheat management difficulty
Core Design Contradiction:
Area of stationary objectVSTemperature

Solution Approach 1:

The large-area detector is segmented into multiple smaller pixel elements organized in an extended array. Each pixel element independently processes X-rays and generates signals, distributing the total heat generation across many small units. This allows the detector to cover large areas while maintaining manageable heat levels through the modular pixel structure

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The detector architecture transitions to a two-dimensional pixel array structure, allowing area expansion in the lateral dimensions rather than increasing detector thickness. This dimensional approach enables large detection coverage while keeping each pixel's heat generation manageable, as heat dissipation is optimized at the pixel level rather than requiring management of a large monolithic volume

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances the detection efficiency and spatial resolution of X-ray images, facilitating the production of large-area, high-pixel detectors suitable for various applications including medical imaging and cargo scanning.

Implementation Method 1

When an X-ray photon is absorbed in the semiconductor layer, multiple charge carriers (e.g., electrons and holes) are generated

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Implementation Method 2

When an X-ray photon is absorbed in the semiconductor layer, multiple charge carriers (e.g., electrons and holes) are generated

Methodology Applied
Scientific EffectCompton scattering: Compton Scattering

Implementation Method 3

Semiconductor X-ray detectors largely overcome this problem by direct conversion of X-ray into electric signals

Methodology Applied
Scientific EffectDirect conversion:

Data Source

PatentUS11848347B2Methods of making semiconductor X-ray detector
Publication Date: 2023.12.19 SHENZHEN XPECTVISION TECH CO LTD
  • US11848347B2 patent drawing
  • US11848347B2 patent drawing
  • US11848347B2 patent drawing

AI summary

Disclosed herein is an image sensor and a method of making the image sensor. The image sensor may comprise one or more packages of semiconductor radiation detectors. Each of the one or more packages may comprise a radiation detector that comprises a radiation absorption layer on a first strip of semiconductor wafer and an electronics layer on a second strip of semiconductor wafer. The radiation absorption layer may be continuous along the first strip of semiconductor wafer with no coverage gap. The first strip and the second strip may be longitudinally aligned and bonded together. The radiation detector may be mounted on a printed circuit board (PCB) and electrically connected to the PCB close to an edge of the radiation detector.