X-ray detector capacitance-optimized light-tight pad structure

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Solution Overview

Problem

Existing X-ray detectors face challenges in achieving minimal input capacitance while maintaining light-tightness, especially in highly integrated pixel electronics with small distances between detector elements, where light can interfere with analog electronics and degrade response.

Innovation Solution

The X-ray detector design includes a substrate with a readout contact and light protection structures that minimize input capacitance and protect the preamplifier input from direct light incidence, using a combination of conductive connections and insulation layers to optimize the pad structure for reduced capacitance and light shielding.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Shape

If a metallization-free zone is set up around the via connection to reduce capacitance, then the capacitance of the via connections is reduced, but the space requirement increases and light can enter the integrated circuit

Engineering Contradiction:
Improvecapacitance of via connectionVSAvoidspace requirement for readout contact
Core Design Contradiction:
ShapeVSArea of stationary object

Solution Approach 1:

The patent transitions from a two-dimensional planar layout to a three-dimensional stacked architecture. The readout contact is positioned above the integrated circuit substrate, with via connections extending vertically through insulation layers. This vertical stacking allows the metallization-free zone to be confined in the vertical dimension rather than occupying lateral space, thereby reducing the horizontal area requirement while maintaining low capacitance.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent divides the connection structure into multiple vertically separated components: the readout contact on the substrate surface, via connections penetrating through insulation layers, and contact pads on the integrated circuit. This segmentation allows each component to be optimized independently - the via connections can have reduced capacitance through controlled geometry while the overall structure maintains compact footprint.

Inventive Principle:
Principle #1Segmentation

2Shape

If the readout contact is made large to maximize distance from sensor and minimize capacitance, then the capacitance between readout contact and integrated circuit is minimized, but the space requirement increases

Engineering Contradiction:
Improvecapacitance between readout contact and integrated circuitVSAvoidspace requirement for readout contact
Core Design Contradiction:
ShapeVSArea of stationary object

Solution Approach 1:

The patent resolves this contradiction by moving the capacitance-reducing mechanism from the lateral dimension to the vertical dimension. Instead of enlarging the readout contact area to increase distance, the design uses vertical via connections that extend downward through insulation layers, achieving capacitance reduction through increased vertical separation while maintaining a compact horizontal footprint.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Object-affected harmful factors

If light-tight structures are implemented to protect preamplifier input from light, then light interference is prevented, but the input capacitance cannot be minimized simultaneously

Engineering Contradiction:
Improvelight interference with preamplifierVSAvoidinput capacitance of preamplifier
Core Design Contradiction:
Object-affected harmful factorsVSShape

Solution Approach 1:

The patent segments the light protection function from the electrical connection function. The metallization-free zone serves as the light-tight structure protecting the preamplifier input, while separate via connections provide the electrical pathway. This segmentation allows the light protection zone to be optimized for light blocking without compromising the electrical connection geometry, thereby achieving both light tightness and minimal capacitance.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces an intermediary insulating layer between the readout contact and the integrated circuit substrate. This insulating layer with its metallization-free zone serves as both an electrical isolation medium and a light-tight barrier, mediating between the electrical connection requirements and the optical protection requirements without compromising either function.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design achieves reproducible X-ray exposures with high spatial resolution, independent of light incidence, and minimizes parasitic capacitance, ensuring stable response of sensitive analog circuits.

Implementation Method 1

The input of the preamplifier is protected against direct incidence of light

Methodology Applied
Scientific EffectLight blocking: Absorption (EM radiation)

Implementation Method 2

The electron-hole pairs are separated by an electric field applied to the sensor

Methodology Applied
Scientific EffectElectron-hole pair separation: Electric Field

Implementation Method 3

The X-rays or the photons can be converted into electrical pulses by a suitable sensor

Methodology Applied
Scientific EffectX-ray to electrical conversion: Photoelectric Effect

Data Source

PatentEP3314654B1X-ray detector having a capacitance-optimised light-tight pad structure
Publication Date: 2019.07.24 SIEMENS HEALTHCARE GMBH
  • EP3314654B1 patent drawingFigure 1
  • EP3314654B1 patent drawingFigure 2
  • EP3314654B1 patent drawingFigure 3

AI summary

The invention relates to an x-ray detector (1) comprising a substrate (23) which has an electrically conductive connection between a read-out contact (57) in the region of the top side of the substrate (23) and an input of a pre-amplifier (3) in an active layer (5) of an integrated circuit. A first electrically conductive connection (17) is provided between the read-out contact and a second electrically conductive connection (19). A surface of a first light protection (7) on the top side of the substrate (23) is larger than a surface of a light-permeable region (15) in the substrate, laterally delimited by a second light protection (9), so that the surface of the first light protection (7) covers the surface of the light-permeable region (15) in a first projection along the surface normal. The second electrically conductive connection (19) is provided within a second projection of the surface of the light-permeable region (15) along the surface normal and below the second light protection (9). A third electrically conductive connection (21) between the second electrically conductive connection (19) and the pre-amplifier (3) is provided below the second light protection (9). The input of the pre-amplifier (3) is protected against direct incidence of light.