X-ray Detector Photosensitive Area Expansion via Layer Separation
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Solution Overview
Problem
Existing X-ray detectors face reduced detection accuracy when the photosensitive layer is enlarged, as this leads to a decrease in detection module density.
Innovation Solution
The X-ray detector design includes a base substrate with detection modules featuring a thin film transistor, an insulating layer with via holes, a photosensitive structure, and a scintillation layer, where the photosensitive structure consists of a lightly doped amorphous silicon layer and an organic-inorganic composite dielectric thin film, allowing for an enlarged photosensitive area without reducing detection accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If the photosensitive layer is enlarged to increase detection area, then the photosensitive area increases, but the detection module density decreases
Solution Approach 1:
The patent separates the photosensitive structure from the thin film transistor into different spatial layers. The photosensitive structure is positioned above the insulating layer while the TFT is below, allowing the photosensitive area to be enlarged without increasing the footprint of each detection module, thereby maintaining high detection module density while achieving larger photosensitive area.
Solution Approach 2:
The detection module is segmented into distinct functional components: the thin film transistor layer and the photosensitive structure layer, separated by an insulating layer. This segmentation allows independent optimization of each component's area and density, enabling the photosensitive area to be enlarged without compromising the overall detection module density.
2Area of stationary object
If the photosensitive layer is enlarged, then the photosensitive area increases, but the detection accuracy decreases
Solution Approach 1:
By moving the photosensitive structure to a separate layer above the insulating layer, the patent enables area expansion in the vertical dimension without compromising the horizontal density and precision of individual detection elements. This spatial separation allows larger photosensitive area while maintaining detection accuracy through preserved module density.
Solution Approach 2:
The insulating layer acts as an intermediary between the thin film transistor and the photosensitive structure, enabling electrical isolation while maintaining structural integrity. This allows the photosensitive structure to be enlarged and separated from the TFT without affecting the electrical performance and detection accuracy of individual modules.
3Area of stationary object
If the photosensitive structure is separated from the thin film transistor, then the photosensitive area can be enlarged, but the device structure becomes more complex
Solution Approach 1:
The patent resolves structural complexity by utilizing vertical layering instead of horizontal expansion. The photosensitive structure is positioned in a different vertical layer (above the insulating layer) rather than expanding the horizontal footprint, which simplifies the overall device architecture while enabling larger photosensitive area.
Solution Approach 2:
The insulating layer serves multiple functions: electrical isolation between TFT and photosensitive structure, mechanical support for the photosensitive structure, and spacer for vertical positioning. This multi-functionality reduces the need for additional structural components, thereby simplifying the overall device structure despite the separated configuration.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances the signal-to-noise ratio and detection quantum efficiency while maintaining detection accuracy by separating the photosensitive structure from the thin film transistor, thus increasing the photosensitive area without affecting the detection module density.
Implementation Method 1
a scintillation layer disposed on the detection module
Implementation Method 2
the photosensitive layer includes a lightly doped amorphous silicon photosensitive layer
Data Source
AI summary
A X-ray detector includes: a base substrate; a plurality of detection modules disposed on the base substrate, wherein the detection module includes a thin film transistor disposed on the base substrate, an insulating layer with a via hole disposed on the thin film transistor and a photosensitive structure disposed on the insulating layer, a first electrode of the thin film transistor is electrically connected to the photosensitive structure through the via hole on the insulating layer, and the first electrode is a source or a drain electrode of the thin film transistor; and a scintillation layer disposed on the detection module. In the present disclosure, by disposing the photosensitive structure and the TFT in different layers, the photosensitive area of the photosensitive structure is enlarged, and it will not be affected by the TFT.