X-ray Device Partitioned Chamber Thermal Distortion Control

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Solution Overview

Problem

X-ray devices experience thermal distortion due to temperature changes, leading to a decrease in detection accuracy, as components such as the X-ray source and stage can undergo thermal deformation, affecting the relative positions and thus the accuracy of X-ray transmission detection.

Innovation Solution

An X-ray apparatus is designed with a partitioned internal space to separate the X-ray source and detector, using a temperature-controlled gas to maintain a stable environment around the X-ray source and prevent thermal distortion, while a high-resolution measuring device is used to accurately measure the stage's position, ensuring precise X-ray transmission detection.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If the X-ray source and detector are placed in the same internal space, then the device structure is simple, but thermal distortion occurs leading to decreased detection accuracy

Engineering Contradiction:
Improvedevice structureVSAvoiddetection accuracy
Core Design Contradiction:
Device complexityVSMeasurement precision

Solution Approach 1:

The internal space is divided into a first space containing the X-ray source and a second space containing the detector, separated by a partition. This segmentation isolates the heat-generating X-ray source from the detection system, preventing thermal distortion while maintaining a relatively compact overall structure.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A partition is introduced as an intermediary structure between the X-ray source and detector. This partition acts as a thermal barrier that blocks heat transfer from the source to the detector, thereby maintaining detection accuracy without requiring complete spatial separation.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Measurement precision

If high-resolution measuring device is used to measure stage position, then detection accuracy is improved, but device complexity increases

Engineering Contradiction:
Improveposition measurement accuracyVSAvoidmeasuring device complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent replaces complex mechanical measurement systems with optical interferometry. The interferometer uses light wave interference patterns to measure stage position with high precision, eliminating the need for complex mechanical scales and readout mechanisms while achieving superior measurement accuracy.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Measurement precision

If temperature control is implemented to prevent thermal distortion, then detection accuracy is maintained, but energy consumption increases

Engineering Contradiction:
Improvedetection accuracyVSAvoidenergy consumption
Core Design Contradiction:
Measurement precisionVSUse of energy by moving object

Solution Approach 1:

Instead of controlling the temperature of the entire device, the patent extracts and isolates the heat source (X-ray source) into a separate space. This allows the detector and measurement system to operate in a thermally stable environment without requiring active temperature control, significantly reducing energy consumption while maintaining detection accuracy.

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration effectively suppresses thermal distortion and maintains detection accuracy by controlling temperature and using high-resolution positioning, thereby preventing a decrease in detection precision even with temperature fluctuations.

Implementation Method 1

a partition configured to divide the internal space into a first space in which the X-ray source is placed and a second space in which the detector is placed

Methodology Applied
Scientific EffectThermal insulation: Thermal Insulation

Implementation Method 2

a measuring device configured to measure position of the stage, wherein the measuring device has a higher resolution in a first space spatially close to the X-ray source with respect to a radiation direction of the X-ray emitted from the X-ray source than in a second space spatially closer to the detector than the first space

Methodology Applied
Scientific EffectPosition measurement:

Implementation Method 3

an X-ray source configured to emit the X-ray; a detector configured to detect at least a part of the X-ray which is emitted from the X-ray source and has passed through the object

Methodology Applied
Scientific EffectX-ray transmission: X-Ray

Data Source

PatentUS10705030B2X-ray device, X-ray irradiation method, and manufacturing method for structure
Publication Date: 2020.07.07 NIKON CORP
  • US10705030B2 patent drawing
  • US10705030B2 patent drawing
  • US10705030B2 patent drawing

AI summary

Provided is an x-ray device capable of suppressing reduction in detection precision. The X-ray device irradiates x-rays on an object and detects X-rays that pass through the object. The X-ray device comprises: an X-ray source that emits X-rays; a stage that holds the object; a detection device that detects at least some of the x-rays that have been emitted from the X-ray source and have passed through the object; a chamber member that forms an internal space wherein the X-ray source, the stage, and the detection device are arranged; and a partitioning section that separates the internal space into a first space wherein the X-ray source is arranged and a second space wherein the detection device is arranged.