X-ray Diffraction Evaluation Device for Crystal Defect Analysis
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Solution Overview
Problem
Existing evaluation devices face challenges in precisely evaluating crystal defects and distortions in samples with crystalline materials using X-ray diffraction measurements, particularly due to difficulties in separating sub-peaks from main peaks and quantitatively analyzing crystal defects through X-ray topograph imaging methods.
Innovation Solution
An evaluation device incorporating an X-ray diffraction measuring device and an analysis device that measures X-ray rocking curves to separate sub-peaks from main peaks, allowing for evaluation based on peak position, intensity, and half-width, providing precise analysis of crystal defects and distortions in samples with crystalline materials.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If X-ray diffraction measurement is used to evaluate crystal defects, then measurement capability is provided, but difficulty in separating sub-peaks from main peaks occurs
Solution Approach 1:
The patent applies segmentation by dividing the overlapping peak region into multiple distinct peaks (main peak and sub-peaks) through mathematical decomposition. The analysis device separates the measured diffraction pattern into individual peak components, allowing precise evaluation of crystal defects by analyzing each peak's position, intensity, and width independently.
Solution Approach 2:
The patent introduces an analysis device as an intermediary between the X-ray diffraction measurement and the evaluation process. This device performs peak separation algorithms to resolve the overlapping main peak and sub-peaks, transforming the difficult measurement problem into a solvable analysis task that enables precise crystal defect evaluation.
2Loss of information
If topograph imaging method is used, then imaging capability is provided, but quantitative analysis of crystal defects is difficult
Solution Approach 1:
The patent changes the measurement parameters by utilizing multiple diffraction conditions (different incident angles and reflection planes) to obtain rocking curves with distinct peak characteristics. By analyzing variations in peak position, intensity, and width across different measurement conditions, the system achieves quantitative analysis of crystal defects that was not possible with single-condition topograph imaging.
3Device complexity
If sub-peaks are not separated from main peak, then measurement process is simple, but evaluation accuracy decreases
Solution Approach 1:
The patent performs preliminary peak separation analysis before final defect evaluation. The analysis device automatically decomposes the overlapping peaks into main peak and sub-peak components, extracting their individual parameters. This preliminary action simplifies the subsequent evaluation process by providing already-separated peak data, maintaining both accuracy and operational simplicity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise evaluation of crystal defects and distortions by accurately separating and analyzing sub-peaks from main peaks, enhancing the ability to quantify crystal defects and distortions in samples, thereby improving the evaluation process.
Implementation Method 1
The sample is evaluated by X-ray diffraction measurement
Data Source
AI summary
An evaluation device includes an X-ray diffraction measuring device configured to acquire a first X-ray locking curve having a first main peak and a first sub-peak partially overlapping the first main peak by measuring an X-ray locking curve of a first portion of a sample having a crystalline material. The evaluation device includes an analysis device configured to separate the first sub-peak from the first main peak, perform first evaluation of a crystal defects or distortion of the sample based on a peak position, peak intensity, or a half width of the separated first sub-peak, and output the first evaluation.