X-ray Dosage Mitigation for Semiconductor Inspection
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Solution Overview
Problem
Current X-ray inspection systems cannot measure total X-ray dosage in real time, leading to potential latent damage to electronic components such as semiconductors during inspection.
Innovation Solution
A system and method that employs a radiation generator to expose electronic components to ionizing radiation within a contained environment, using radiation detectors to measure and map the total radiation dosage, triggering an alarm when a pre-determined limit is reached, and adjusting exposure settings to prevent damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If X-ray inspection is performed on electronic components, then defect detection capability is improved, but latent damage to components occurs due to cumulative radiation dosage
Solution Approach 1:
The system continuously monitors cumulative radiation dosage in real-time and provides feedback to control the inspection process. When the accumulated dose approaches a predetermined threshold, the system automatically adjusts inspection parameters or terminates exposure, preventing latent damage while maintaining defect detection capability
Solution Approach 2:
The system pre-determines safe radiation dosage thresholds based on component sensitivity and inspection requirements. By establishing these limits before inspection begins, the system can proactively control exposure levels to prevent latent damage while ensuring adequate defect detection
2Reliability
If real-time radiation dosage measurement is implemented, then component safety is improved, but system complexity increases
Solution Approach 1:
The radiation detection system serves multiple functions: it measures real-time dosage, tracks cumulative exposure, compares against thresholds, and triggers control actions. This multi-functionality reduces the need for separate safety systems while improving component protection
Solution Approach 2:
The system automatically monitors and controls its own radiation exposure parameters without external intervention. The self-monitoring and self-regulation capabilities reduce the need for additional safety personnel or external monitoring equipment
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively reduces or eliminates latent damage by measuring and controlling X-ray dosage, ensuring safe inspection conditions for electronic components.
Implementation Method 1
employing a radiation generator to expose the electronic component to an ionizing radiation
Implementation Method 2
measuring a total radiation dosage received by the electronic component
Data Source
AI summary
A method for determining a total radiation dosage received by an electronic component includes employing a radiation generator to expose the electronic component to an ionizing radiation within a contained environment of an inspection system. The method further includes measuring a total radiation dosage received by the electronic component based on a pre-determined position in the contained environment of the inspection system.