Band-Stop X-Ray Filter Assembly for High-Count EDX Spectroscopy

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Solution Overview

Problem

Existing X-ray spectroscopy methods for semiconductor manufacturing face inefficiencies due to high count rates of EDX detectors, which impede reliable composition analysis, particularly in complex geometries like 3D chips.

Innovation Solution

A characterization system with a filter assembly, including a band-stop filter and optional electron filter, positioned between the sample and the EDX detector, to selectively transmit information-carrying X-ray photons and attenuate irrelevant photons, thereby increasing the ratio of useful photons reaching the detector.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional EDX detection is used without filtering, then all photons are detected, but the ratio of information-carrying photons to total photons is low, reducing measurement precision

Engineering Contradiction:

Improvecomposition analysis reliabilityVSAvoidsignal-to-noise ratio

Core Design Contradiction:

Measurement precisionVSLoss of information

Solution Approach 1:

The patent extracts and removes irrelevant photons from the detected signal by positioning a filter assembly between the sample and EDX detector. The filter selectively transmits information-carrying X-ray photons while absorbing irrelevant photons, thereby extracting only the useful signal components and improving composition analysis reliability.

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The filter assembly serves as an intermediary component between the sample and EDX detector. It mediates the interaction by selectively transmitting certain photon energies while absorbing others, thus improving the quality of detected signals without requiring modification of the detector hardware itself.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Reliability

If no filter is used, then the detector receives all photons, but irrelevant photons reduce the effectiveness of composition analysis

Engineering Contradiction:

Improvecomposition analysis reliabilityVSAvoidirrelevant photon interference

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent converts the harmful effect of irrelevant photons into a beneficial filtering mechanism. By using materials with specific absorption characteristics, the filter transforms the problem of photon interference into a solution where irrelevant photons are selectively absorbed, thereby enhancing the reliability of composition analysis.

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

3Measurement precision

If a filter assembly is added, then the ratio of information-carrying photons is increased, but the device complexity increases

Engineering Contradiction:

Improvephoton count ratioVSAvoidfilter assembly structure

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The filter assembly is segmented into multiple thin film layers, each with specific thickness and material composition. This segmentation allows precise control over photon transmission characteristics while maintaining a compact structure. The layered approach enables selective filtering of different photon energies through optimized layer configurations.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The patent employs thin film structures as the filter assembly, which provides the necessary filtering functionality while maintaining minimal physical footprint. The thin film configuration allows the filter to be integrated into the existing EDX detector setup without significant structural modifications, thus limiting the increase in device complexity.

Inventive Principle:

Principle #30Flexible shells and thin films

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system significantly enhances the ratio of information-carrying photons reaching the EDX detector by a factor of 8 or more, improving the reliability and efficiency of composition analysis without altering the detector hardware.

Implementation Method 1

a band-stop filter configured to allow transmission therethrough of information-carrying X-ray photons having a predetermined energy range while preventing/attenuating irrelevant photons having an energy range different from the predetermined energy range from reaching the EDX

Methodology Applied

Scientific EffectSelective absorption of photons: Absorption (EM radiation)

Implementation Method 2

an electron filter configured to attenuate back-scattered and/or secondary electrons emitted from the tested sample

Methodology Applied

Scientific EffectElectron absorption: Absorption (physical)

Data Source

PatentUS20260081103A1Notch filter for high throughput x-ray photon spectroscopy

Publication Date: 2026.03.19 APPL MATERIALS ISRAEL LTD

AI summary

Disclosed herein is a sample characterization system including a characterization tool configured to generate an electron beam directed toward a tested sample; an X-ray photon energy dispersive detector (EDX) configured to collect X-ray photons emitted from the tested sample; and a filter assembly positioned in the characterization tool between the tested sample and the EDX, the filter assembly including a band-stop filter configured to allow transmission therethrough of information-carrying X-ray photons having a predetermined energy range and preventing irrelevant photons having an energy range different from the predetermined energy range from reaching the EDX, whereby a ratio between a count of information-carrying X-ray photons reaching the EDX and an overall photon count reaching the EDX is increased as compared to a sample characterization system without the filter assembly.