Compact X-ray Generation Unit Pivoting for Fast Scanning

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Solution Overview

Problem

Conventional X-ray analysis apparatuses require a vacuum environment and large mechanical components for scanning, leading to prolonged scanning times due to the need for moving mechanical parts.

Innovation Solution

An X-ray analysis apparatus with a compact X-ray generation unit that includes a target plate, X-ray convergence optics, and a driving unit, where the target plate and X-ray convergence optics pivot to move the focal position of X-rays on the sample, reducing the need for extensive mechanical movement and allowing for faster scanning.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If conventional X-ray tube with vacuum environment and electron gun is used, then X-rays can be generated, but the X-ray tube size increases making scanning difficult

Engineering Contradiction:

Improvescanning speedVSAvoidX-ray tube size

Core Design Contradiction:

SpeedVSVolume of moving object

Solution Approach 1:

The invention divides the X-ray generation system into separate components: a compact X-ray generation unit with target plate and a separate electron beam source. This segmentation allows the X-ray generation unit to be miniaturized for fast scanning while the electron beam source remains stationary, resolving the contradiction between small size and X-ray generation capability.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The invention introduces angular positioning as a new dimension for controlling X-ray irradiation. Instead of moving the X-ray tube linearly, the system uses a driving unit to position the compact X-ray generation unit at different angular positions around the sample, enabling scanning through rotational movement rather than linear translation.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

2Adaptability or versatility

If stage of sample station is moved for mapping, then different sample positions can be analyzed, but mechanical movement takes much time

Engineering Contradiction:

Improvesample position coverageVSAvoidscanning time

Core Design Contradiction:

Adaptability or versatilityVSLoss of time

Solution Approach 1:

Instead of moving the sample stage to analyze different positions, the invention inverts the approach by moving the X-ray generation unit around a stationary sample. The driving unit rotates the X-ray generation unit to different angular positions, allowing the fixed sample to be analyzed from multiple angles without mechanical stage movement.

Inventive Principle:

Principle #13The other way round (Inversion)

Solution Approach 2:

The invention replaces the mechanical stage movement system with a rotational positioning system for the X-ray generation unit. This substitution eliminates the need for heavy mechanical stage components and their associated movement time, achieving faster scanning through angular positioning instead of linear translation.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Speed

If compact X-ray generation unit is used, then scanning speed increases, but precise focal position control becomes challenging

Engineering Contradiction:

Improvescanning speedVSAvoidfocal position precision

Core Design Contradiction:

SpeedVSMeasurement precision

Solution Approach 1:

The invention incorporates feedback mechanisms through the driving unit that precisely controls the angular position of the compact X-ray generation unit. By measuring and controlling the rotational position accurately, the system maintains precise focal position control on the sample even while enabling high-speed scanning through angular movement.

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The invention uses dynamic positioning of the X-ray generation unit, where the driving unit can adjust the angular position in real-time during scanning. This dynamic control allows the focal position to be precisely adjusted and maintained at different sample locations, achieving both high scanning speed and precise focal control through adaptive positioning.

Inventive Principle:

Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration significantly shortens scanning time and improves analysis processing speed by enabling high-speed scanning and miniaturization of the X-ray generation unit, allowing for more efficient analysis of samples.

Implementation Method 1

The target includes a heavy metal, for example, rhodium, tungsten, molybdenum or the like and can generate X-rays by excitation due to a collision with the electrons and bremsstrahlung.

Methodology Applied

Scientific EffectBremsstrahlung:

Implementation Method 2

X-ray convergence optics that converges X-rays generated from the target in conjunction with a movement of the target plate

Methodology Applied

Scientific EffectX-ray focusing: Focusing

Data Source

PatentUS11467107B2X-ray analysis apparatus and x-ray generation unit

Publication Date: 2022.10.11 HORIBA LTD

AI summary

The X-ray analysis apparatus contains an X-ray generation unit. The X-ray generation unit includes a target plate having a target that is irradiated with an electron beam from an electron beam source and generates X-rays, X-ray convergence optics that converges X-rays generated from the target in conjunction with a movement of the target plate, and a driving unit that changes a position of the target plate or the X-ray convergence optics relative to the electron beam source.