Parallel-Slit X-Ray Goniometer for Minute-Region Measurement

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Solution Overview

Problem

Existing X-ray analysis apparatuses face challenges in downsizing while maintaining the capability to measure minute portions due to limitations in optical system components, particularly when the goniometer arms are long and restrict the arrangement of X-ray generators and incident optical systems.

Innovation Solution

An X-ray analysis apparatus with a goniometer featuring an incident-side arm, a support base, a parallel slit formed by two parallel plates, and a receiving-side arm with a detector, allowing for a simple configuration and small size, capable of measuring minute portions using a parallel slit to limit the X-ray beam width and a moving mechanism to adjust the slit position.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If the goniometer has long arms to arrange various optical system components, then the X-ray analysis apparatus can perform comprehensive measurements, but the apparatus size increases and becomes unsuitable for general purpose use

Engineering Contradiction:
Improvecapability to perform comprehensive measurementsVSAvoidapparatus size
Core Design Contradiction:
Adaptability or versatilityVSVolume of moving object

Solution Approach 1:

The patent combines the X-ray source and parallel slit into a single integrated unit mounted on the incident-side arm of the goniometer. This merging of components allows the apparatus to maintain comprehensive measurement capability while reducing overall apparatus size, making it suitable for general purpose use.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent designs a compact goniometer system that can perform multiple types of X-ray measurements (diffraction, scattering, etc.) using a unified configuration. The incident-side arm accommodates both the X-ray source and parallel slit, enabling the apparatus to function as a universal measurement tool without requiring separate specialized equipment.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Measurement precision

If a parallel slit is used to limit the line width of the X-ray beam for measuring minute portions, then the measurement precision improves, but the X-ray beam intensity varies and the configuration becomes complex

Engineering Contradiction:
Improvecapability to measure minute portionsVSAvoiduniformity of X-ray beam intensity
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The patent employs a parallel slit with a specific geometric configuration where the slit width varies along its length according to a predetermined relationship. This local variation in slit width compensates for the natural divergence of the X-ray beam, maintaining uniform beam intensity across the irradiated area while preserving the capability to measure minute portions with high precision.

Inventive Principle:
Principle #3Local quality

3Device complexity

If the parallel slit is fixed in position, then the configuration is simple, but the apparatus cannot adapt to different measurement requirements

Engineering Contradiction:
Improvesimplicity of configurationVSAvoidcapability to adjust to different measurement requirements
Core Design Contradiction:
Device complexityVSAdaptability or versatility

Solution Approach 1:

The patent incorporates a moving mechanism that enables the parallel slit to be positioned at multiple predetermined locations along the incident-side arm of the goniometer. This dynamic positioning capability allows the apparatus to adapt to different measurement requirements (such as varying beam widths or irradiation areas) while maintaining a relatively simple overall configuration.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables measurement of minute portions with reduced variations in X-ray beam intensity and uniform irradiation area, suitable for pole and stress measurements, while utilizing existing components and achieving a compact design.

Implementation Method 1

an X-ray source, which is arranged on the incident-side arm and is configured to generate an X-ray beam extending in a second direction

Methodology Applied
Scientific EffectX-ray generation: X-Ray

Implementation Method 2

a parallel slit formed by two parallel plates arranged on the fixing portion, and configured to limit a line width along the second direction of the X-ray beam

Methodology Applied
Scientific EffectGeometric constraint: Geometry

Implementation Method 3

a detector, which is arranged on the receiving-side arm, and is configured to detect a scattered X-ray generated by the sample

Methodology Applied
Scientific EffectX-ray scattering: Scattering

Data Source

PatentEP3712901B1X-ray analysis apparatus
Publication Date: 2026.04.01 RIGAKU CORP
  • EP3712901B1 patent drawingFigure 1
  • EP3712901B1 patent drawingFigure 2
  • EP3712901B1 patent drawingFigure 3

AI summary

Provided is an X-ray analysis apparatus including: a goniometer including an incident-side arm extending in a first direction, a fixing portion, and a receiving-side arm; an X-ray source portion, which is arranged on the incident-side arm and generates an X-ray source extending in a second direction, which crosses the first direction; a support base, which is arranged on the fixing portion, and is configured to support a sample; a parallel slit, which is arranged on the fixing portion, and is configured to limit a line width along the second direction of the X-ray source generated by the X-ray source portion; and a detector, which is arranged on the receiving-side arm, and is configured to detect a scattered X-ray generated by the sample.