Microstructured X-ray Transmission Grating Manufacturing
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Solution Overview
Problem
The existing manufacturing techniques for X-ray transmission gratings face challenges such as high costs, limited material selection, and high process times due to the need for electroplating and complex clean room processes, which also result in inhomogeneous filling and mechanical stress on substrates.
Innovation Solution
A method involving a substrate with periodically arranged cavities filled with loose, dry powder X-ray absorbing materials, where the powder is consolidated using a coating process to form high-absorption grating portions, eliminating the need for electroplating and reducing mechanical stress, while allowing for homogeneous and efficient filling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If LIGA techniques with electroplating are used to manufacture X-ray transmission gratings, then the grating structure can be formed with precise dimensions, but the manufacturing cost increases significantly and the chip surface area is limited to only a few square centimeters
Solution Approach 1:
The patent extracts the electroplating step from the manufacturing process, replacing it with direct deposition of X-ray absorbing material onto the grating structure. This eliminates the need for complex LIGA techniques while maintaining manufacturing precision and enabling larger chip surfaces.
Solution Approach 2:
The patent uses a sacrificial layer that is deposited and then completely removed after serving its purpose of defining the grating structure. This disposable approach simplifies the overall manufacturing process by eliminating the need for complex electroplating molds and reducing manufacturing costs.
2Manufacturing precision
If synchrotron is used for exposing photoresist in LIGA process, then the photoresist structures can be formed accurately, but the process costs become very high
Solution Approach 1:
The patent removes the synchrotron exposure step from the manufacturing process by using direct physical deposition methods to form the grating structure. This eliminates the need for expensive synchrotron facilities while maintaining the ability to create accurate grating patterns through controlled material deposition.
3Manufacturing precision
If electroplating is used to deposit X-ray absorbing materials, then the grating can be formed, but the process time becomes very long and the material selection is limited
Solution Approach 1:
The patent replaces the electrochemical electroplating process with a physical deposition method where X-ray absorbing material is directly deposited onto the grating structure. This substitution dramatically reduces process time and enables a much broader selection of absorbing materials including metals, metal oxides, and other X-ray opaque materials.
4Manufacturing precision
If centrifugation is used to fill metal particles into grating gaps, then the grating structure can be formed, but high mechanical loads are applied to substrates and process automation becomes difficult
Solution Approach 1:
The patent extracts the centrifugation step from the manufacturing process and replaces it with a gentle deposition method where material is directly deposited onto the grating structure. This eliminates high mechanical loads on substrates while maintaining uniform filling of the grating gaps, and facilitates easier process automation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the rapid, reliable, and cost-effective production of X-ray transmission gratings with high absorption and mechanical stability, avoiding the limitations of conventional methods by using loose powder and consolidation techniques, resulting in improved manufacturing precision and reduced process time.
Implementation Method 1
the first grating portions (122, 322a,b, 422a,b) comprise a plurality of particles (130, 230, 330a,b, 430a,b, 530, 630, 730) which, in particular, are present in the form of loose powder (330a, 430a,b, 630, 730) and/or in the form of particles consolidated by means of a coating (330b, 430b, 632d,e)
Data Source
AI summary
Embodiments according to the present invention include a method for manufacturing a micostructured transmission grating for X-radiation, the method comprising: providing a substrate and creating a grating structure by means of structuring a plurality of periodically arranged cavities in a first main side of the substrate, wherein individual ridges of substrate material remain between each of the cavities, and filling the cavities with a plurality of particles present in the form of loose, dry powder. In this regard, the substrate has a lower absorption of X-radiation than the dry particle powder.