X-ray Generating Apparatus with Grooved Target for Micrometer Line Width
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Solution Overview
Problem
Conventional X-ray generating apparatuses struggle to produce stripe-like X-rays with high aspect ratio and contrast, as existing technologies like transmission-type diffraction gratings and Fresnel zone plates cannot achieve zero X-ray attenuation, making it difficult to obtain X-rays with micrometer-scale line widths.
Innovation Solution
An X-ray generating apparatus with a target surface featuring fine-width grooves, where an electron beam is inclined to irradiate the grooves, creating a multi-line X-ray source with a predetermined extraction angle, and optionally using low atomic number elements within or coated on the grooves to enhance contrast.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a transmission-type diffraction grating or Fresnel zone plate is used to produce stripe-like X-ray, then the X-ray can be generated, but the attenuation cannot be reduced to zero in the transmission region, making it difficult to obtain high aspect ratio and high contrast stripe-like X-ray
Solution Approach 1:
The target surface is segmented into multiple groove structures that divide the X-ray generation area into distinct transmission and absorption regions. These grooves create multiple line-like targets that generate stripe-like X-ray patterns with high contrast and precision.
Solution Approach 2:
Different regions of the target surface are given different properties: the groove regions provide X-ray absorption while the inter-groove regions provide transmission. This local differentiation enables high aspect ratio and high contrast stripe-like X-ray generation.
2Device complexity
If conventional X-ray generating apparatus is used, then the apparatus structure is simple, but it cannot produce stripe-like X-ray with micrometer-scale line width and high aspect ratio
Solution Approach 1:
The invention introduces a new dimension of control by creating grooves on the target surface, transforming the conventional point-like or area-like X-ray source into a structured multi-line source. This dimensional transformation enables micrometer-scale line width control without significantly complicating the overall apparatus structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively produces X-rays with fine widths of the order of micrometers, enabling high-contrast inspection using a simple setup, such as a transmission-type 1-dimensional grating, with improved line width and intensity distribution.
Implementation Method 1
an electron source, which is provided within said tube body to generate an electron beam therefrom
Implementation Method 2
a target, which is provided within said tube body and irradiated with the electron beam emitting from said electron source, thereby to generate an X-ray therefrom
Implementation Method 3
on a surface of a member building up said target are formed plural numbers of grooves, each having fine width, repetitively, thereby irradiating the electron beam from said electron source, inclining by a predetermined angle, from a direction perpendicular to an elongating direction of said grooves, so that they bridge over said plural numbers of grooves, and also a multi-line X-ray generating from the plural numbers of multi-line targets, which are formed between said grooves, emits at a predetermined extraction angle
Data Source
AI summary
An X-ray generating apparatus is disclosed which includes a tube body having a vacuum interior, an electron source provided within the tube body to generate an electron beam, a target, within the tube body that is irradiated with the electron beam to generate an X-ray, and an X-ray window for taking out the X-ray generated outside of the tube body. A plurality of grooves are formed on a surface of a member building up the target. The grooves each have a fine width and are inclined by a predetermined angle (α), from a direction perpendicular to an elongating direction of the grooves, so that they bridge over the plural numbers of grooves. The X-ray generating apparatus is configured such that a multi-line X-ray generating from the plural numbers of multi-line targets, which are formed between the grooves, emits at a predetermined extraction angle (β), passing through the X-ray window. An inspection apparatus which includes the X-ray generating apparatus is also disclosed.