X-Ray Imaging Mirror System Aberration Control

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Solution Overview

Problem

Existing X-ray microscope optical systems face challenges in reducing energy loss and increasing numerical aperture and field of view due to the need for multiple mirrors, which limits space and efficiency.

Innovation Solution

An imaging device configuration using a combination of elliptical and hyperbolic mirrors, along with a one-dimensional detector with superconducting strips, to minimize wavefront aberration and enhance image quality, allowing for a three-mirror system that reduces light intensity loss and increases the numerical aperture and field of view.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If four mirrors are used in the optical system, then wavefront aberration can be corrected, but energy loss increases due to multiple reflections

Engineering Contradiction:
Improvewavefront aberration correctionVSAvoidenergy loss
Core Design Contradiction:
Measurement precisionVSLoss of energy

Solution Approach 1:

The patent combines the functions of multiple mirrors into a single mirror with specific surface shapes. The single mirror integrates both wavefront correction capabilities and light collection functions, eliminating the need for separate correction mirrors and reducing the total number of reflection surfaces from four to one, thereby reducing energy loss while maintaining aberration correction

Inventive Principle:
Principle #5Merging (Combining)

2Measurement precision

If four mirrors are used in the optical system, then imaging quality can be maintained, but device complexity increases

Engineering Contradiction:
Improveimaging qualityVSAvoiddevice complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent merges multiple optical components into a single integrated mirror structure. By combining wavefront correction and light collection functions into one component with specifically designed surface profiles, the system reduces the number of parts from four mirrors to one, simplifying the overall device structure while preserving imaging quality

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The single mirror in the patent performs multiple functions simultaneously: it collects light from the X-ray source, corrects wavefront aberrations, and directs light to the detector. This multi-functional design eliminates the need for separate correction and collection mirrors, reducing device complexity while maintaining performance

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Length of stationary object

If the length of the optical system is limited, then space for arranging mirrors is small, but numerical aperture and field of view need to be enlarged

Engineering Contradiction:
Improveoptical system lengthVSAvoidnumerical aperture
Core Design Contradiction:
Length of stationary objectVSReliability

Solution Approach 1:

The patent employs mirrors with specific curved surface profiles (including elliptical and paraboloidal shapes) that enable compact optical path folding. These curved surfaces allow the optical system to achieve the required numerical aperture and field of view within a limited axial length by strategically directing light paths through controlled reflections, maximizing space utilization

Inventive Principle:
Principle #14Spheroidality (Curvature)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively reduces wavefront aberration, minimizes light intensity loss, and enlarges the numerical aperture and field of view, improving image contrast and resolution without the need for a conventional four-mirror system.

Implementation Method 1

a first image forming element that collects components of the imaging light in the first direction and forms an image on the light receiving surface with a first wave front aberration amount, and a second image forming element that collects components of the imaging light in a second direction orthogonal to the first direction

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 2

a one-dimensional detector including a plurality of superconducting strips arranged parallel to each other

Methodology Applied
Scientific EffectSuperconductivity: Superconductivity

Implementation Method 3

when photons are incident on the superconducting strip, a part of the superconducting region transitions to a normal conducting state

Methodology Applied
Scientific EffectPhotoelectric Effect: Photoelectric Effect

Data Source

PatentUS11573392B2Imaging device, image generating device, and imaging method
Publication Date: 2023.02.07 KIOXIA CORP
  • US11573392B2 patent drawing
  • US11573392B2 patent drawing
  • US11573392B2 patent drawing

AI summary

An imaging device of an embodiment comprises an aperture that transmits imaging light applied to a sample, a detector including a linear sensor comprising a linear light receiving surface extending in a first direction, a first image forming element that collects components of the imaging light in the first direction and forms an image on the light receiving surface with a first wave front aberration amount, and a second image forming element that collects components of the imaging light in a second direction orthogonal to the first direction and forms an image on the light receiving surface with a second wave front aberration amount smaller than the first wave front aberration amount.