X-ray Inspection Foreign Object Area Calculation

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Solution Overview

Problem

Conventional X-ray transmission inspection methods fail to accurately estimate the size of foreign objects in samples due to insufficient consideration of thickness, leading to underestimation or overestimation of foreign object sizes.

Innovation Solution

An X-ray transmission inspection apparatus and method that calculates the planar area of a foreign object based on the number of effective pixels with luminance reduction amounts greater than or equal to a luminance reduction threshold, which is a predetermined ratio to the maximum luminance reduction amount, allowing for precise estimation regardless of the foreign object's thickness.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If the thickness of the foreign object is fixed as a constant value to simplify calculation, then the calculation process becomes easier, but the estimation precision of the foreign object size becomes low

Engineering Contradiction:
Improvecalculation processVSAvoidestimation precision of foreign object size
Core Design Contradiction:
Ease of operationVSMeasurement precision

Solution Approach 1:

The patent changes the parameter approach from using a fixed constant thickness value to dynamically determining thickness based on luminance reduction amounts. The thickness is calculated as a variable parameter derived from the relationship between luminance reduction and object dimensions, allowing the system to adapt to different foreign object thicknesses while maintaining calculation simplicity through automated parameter derivation.

Inventive Principle:
Principle #35Parameter changes

2Ease of operation

If a fixed luminance threshold (e.g., 10 times lower than surrounding pixels) is used to specify luminance-reduced regions, then the detection method becomes simpler, but the estimation precision of planar size and three-dimensional size becomes low

Engineering Contradiction:
Improvedetection methodVSAvoidestimation precision of planar size and three-dimensional size
Core Design Contradiction:
Ease of operationVSMeasurement precision

Solution Approach 1:

The patent replaces fixed luminance thresholds with dynamic threshold determination based on the maximum luminance reduction amount in the image. The threshold is calculated as a predetermined ratio (e.g., 50%) of the maximum luminance reduction, allowing the detection method to automatically adapt to different imaging conditions and foreign object characteristics while maintaining simplicity through automated threshold calculation.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The system uses feedback from the actual luminance reduction measurements to determine the appropriate threshold. By first identifying the maximum luminance reduction amount in the image and then setting the threshold based on this measured value, the system creates a feedback loop that ensures the threshold is optimally suited to the specific imaging conditions and foreign object being detected.

Inventive Principle:
Principle #23Feedback

3Device complexity

If only the planar area is calculated without considering thickness, then the calculation becomes simpler, but the three-dimensional size estimation becomes inaccurate

Engineering Contradiction:
Improvecalculation complexityVSAvoidthree-dimensional size estimation accuracy
Core Design Contradiction:
Device complexityVSMeasurement precision

Solution Approach 1:

The patent extends the calculation from two-dimensional planar area to three-dimensional size estimation by incorporating thickness as an additional dimension. The thickness is derived from the luminance reduction amount using the relationship: thickness = (luminance reduction amount / maximum luminance reduction amount) × reference thickness. This dimensional extension allows accurate three-dimensional size estimation while maintaining calculation simplicity through the use of proportional relationships.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables high-precision calculation of the planar area and three-dimensional size of foreign objects, improving estimation accuracy by considering the relationship between luminance reduction and object size, independent of the object's thickness.

Implementation Method 1

an X-ray source configured to irradiate a sample with X-rays; an X-ray sensor installed on a side opposite to the X-ray source with respect to the sample and configured to detect transmitted X-rays when the X-rays pass through the sample

Methodology Applied
Scientific EffectX-ray transmission: X-Ray

Data Source

PatentUS20240255445A1X-ray transmission inspection apparatus and x-ray transmission inspection method
Publication Date: 2024.08.01 HITACHI HIGH TECH ANALYSIS CORP
  • US20240255445A1 patent drawing
  • US20240255445A1 patent drawing
  • US20240255445A1 patent drawing

AI summary

Proposed are an X-ray transmission inspection apparatus and an X-ray transmission inspection method, in which the size (planar area) a foreign object can be obtained with higher precision. The inspection apparatus includes an X-ray source configured to irradiate a sample with an X-rays, an X-ray sensor configured to detect transmitted X-rays, and a calculation part configured to calculate a planar area of a foreign object in the sample, wherein the calculation part obtains luminance distribution divided into a plurality of pixels according to luminance of the transmitted X-rays in a plane perpendicular to an irradiation direction of the X-rays, calculates, as numbers of effective pixels, numbers of the pixels having luminance reduction amounts greater than or equal to a luminance reduction threshold, and calculates the planar area of the foreign object based on the numbers of the effective pixels.