X-ray Inspection Apparatus Position Correction
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing X-ray inspection techniques face challenges in maintaining high positioning accuracy, especially with multi-axis stages, leading to deterioration of three-dimensional data quality due to repeatability errors, and are limited by the accuracy of sensors and applicability to non-turnable tables.
Innovation Solution
An X-ray inspection apparatus that includes a motor-driven stage for moving the inspection object, X-ray source, or camera, with a position detection unit storing motor position values over time, an imaging timing unit, and a reconstruction unit using these values to calculate and correct relative positions for high-quality three-dimensional data reconstruction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the stages are moved at high speed to shorten inspection time, then productivity is improved, but positioning accuracy deteriorates
Solution Approach 1:
The patent uses position detection units (encoders) to continuously monitor the actual positions of the X-ray source and camera stages. The detected position information is fed back to the control unit, which calculates the deviation from intended positions and applies correction values during the reconstruction process. This feedback mechanism enables high-speed stage movement while maintaining positioning accuracy through software-based correction.
2Measurement precision
If sensors with higher accuracy are used to improve positioning precision, then measurement precision is improved, but device complexity and cost increase
Solution Approach 1:
The patent replaces the need for high-precision mechanical stage positioning with a software-based correction system. Standard position detection units (encoders) are used to detect stage positions, and the control unit calculates correction values based on detected deviations. This substitution of mechanical precision requirements with computational correction allows the use of conventional sensors while achieving high positioning accuracy.
3Measurement precision
If preliminary learning of deviation is performed to correct imaging position, then positioning accuracy is improved, but reliability deteriorates due to repeatability errors
Solution Approach 1:
The patent performs preliminary action by detecting the actual positions of stages and calculating correction values during each imaging operation. Rather than relying on pre-established deviation patterns, the system proactively measures actual positions and computes real-time corrections. This approach ensures accurate positioning for each individual imaging operation, eliminating repeatability errors by adapting to actual stage positions rather than assuming consistent deviations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces the deterioration of three-dimensional data quality caused by repeatability errors without increasing costs or limiting apparatus structure, achieving high accuracy and wide applicability, including XY or XYZ stages and turnable stages.
Implementation Method 1
an X-ray source 10 and an X-ray camera 20
Data Source
AI summary
An X-ray inspection apparatus includes a stage that moves an inspection object, an X-ray source, and/or an X-ray camera by driving a motor, a position detection unit that periodically obtains a position detection value of the motor, and stores the value in association with time, an imaging timing obtaining unit that stores an imaging timing at which imaging is performed by the X-ray camera in association with time, an imaging position calculation unit that calculates relative positions of the inspection object, and the X-ray source and the X-ray camera corresponding to the imaging timing using the position detection value of the motor at the imaging timing, and a reconstruction unit that performs reconstruction using image data captured by the X-ray camera and the relative positions in the image data at the imaging timing.