X-ray Inspection Device for Thick Samples
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Solution Overview
Problem
Existing X-ray inspection devices face challenges in detecting foreign matter with high sensitivity in thick inspection target objects due to low detection output and degradation of spatial resolution when using time delay integration.
Innovation Solution
An X-ray inspection device and method that includes an X-ray source, a transport unit for rotating the sample in synchronization with the detector, and a time delay integration type detector to maintain high sensitivity and spatial resolution for thick samples.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If time delay integration is used to detect foreign matter with high sensitivity in thick samples, then detection sensitivity is improved, but spatial resolution is degraded
Solution Approach 1:
The sample is rotated during the inspection process to dynamically change its orientation relative to the X-ray source and detector. This dynamic adjustment allows the system to optimize the detection path through the sample, reducing the effective thickness that X-rays must penetrate while maintaining spatial resolution through synchronized detection timing.
Solution Approach 2:
The system changes the inspection parameter by rotating the sample to different angles, transforming the detection problem from a single fixed-path measurement to a multi-angle measurement process. This parameter change enables the system to achieve both high detection sensitivity and maintained spatial resolution by selecting optimal measurement angles.
2Manufacturing precision
If the number of detecting element rows is reduced for thick samples, then spatial resolution is maintained, but detection output decreases
Solution Approach 1:
By dynamically rotating the sample during inspection, the system can use fewer detector rows effectively because the rotation provides multiple measurement opportunities from different angles. The synchronized time delay integration accumulates signals over multiple rotational positions, maintaining detection output while preserving spatial resolution with reduced detector complexity.
Solution Approach 2:
The continuous rotation of the sample during inspection ensures that the detection process is ongoing and cumulative. Instead of requiring all detector rows to be active simultaneously, the continuous rotational movement allows signal accumulation over time from different angular positions, maintaining detection sensitivity with fewer active detector elements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the detection of fine defects in thick samples with high sensitivity without degrading spatial resolution, improving detection capabilities for thick inspection target objects.
Implementation Method 1
a time delay integration type detector which detects X-rays generated by the X-ray source and transmitted through the sample transported by the transport unit
Implementation Method 2
an X-ray source that generates X-rays
Data Source
AI summary
Detection can be performed even for a thick inspection target object through time delay integration without degradation of spatial resolution. There is provided an X-ray inspection device configured to include: an X-ray source that generates X-rays; a transport unit that performs transporting a sample; a detecting unit that has a time delay integration type detector which detects X-rays generated by the X-ray source and transmitted through the sample transported by the transport unit; and a defect determining unit that processes a signal obtained by detecting the X-rays transmitted through the sample by the time delay integration type detector of the detecting unit and determines a defect in the sample. The transport unit performs transporting the sample while causing the sample to rotate in synchronization with the transporting when the sample passes in front of the time delay integration type detector of the detecting unit.